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Start Over Descriptor "Silicon nitride -- Electric properties" Journal ieee transactions on dielectrics and electrical insulation
1 results on '"Silicon nitride -- Electric properties"'

1. Patterning of inorganic electrets

Author

Leonov, V. and Schaijk, R.V.

Subjects
Photolithography -- Usage, Silica -- Electric properties, Silica -- Optical properties, Silicon nitride -- Electric properties, Silicon nitride -- Optical properties, Business, Electronics, Electronics and electrical industries
Published
2010

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