1. A +0.66/−0.73 °C Inaccuracy, 1.99-μW Time-Domain CMOS Temperature Sensor With Second-Order ΔΣ Modulator and On-Chip Reference Clock.
- Author
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Chen, Yang, Jiao, Zihao, Guan, Weijun, Sun, Quan, Wang, Xiaofei, Zhang, Ruizhi, and Zhang, Hong
- Subjects
TEMPERATURE sensors ,RELAXATION oscillators ,ELECTRONIC modulators ,INTERNET of things ,TIME-domain analysis - Abstract
This paper presents a compact and low-power time-domain CMOS temperature sensor intended for Internet of Things. To eliminate the off-chip reference clock that is commonly needed for time-domain CMOS temperature sensors, a precise on-chip reference clock is designed to measure the temperature-dependent delay generated by an inverter chain with even stages. In the reference clock circuit, a relaxation oscillator showing discharging phases with negative temperature coefficient (TC) is designed, which are compensated by 2 identical inverter-chains with positive-TC delay, resulting in a reference clock with nearly temperature-independent pulse width and period. In addition, a $2^{{\text {nd}}}$ -order hybrid time-voltage delta-sigma ($\Delta \Sigma $) modulator with feedforward path is proposed to quantize the temperature-dependent delay of the main inverter chain, achieving 100-mK resolution only in about 25-ms conversion time. Fabricated in 0.18- $\mu \text{m}$ CMOS, measurement results show that the best (worst)-case temperature accuracy of the clock’s reference time is ±0.015% (±0.055%) and the temperature sensor achieves a maximum inaccuracy of +0.66/−0.73 °C from −20 °C to −80 °C. The prototype occupies 0.45-mm2 chip area and consumes 1.99- $\mu \text{W}$ from a 1.8-V supply at room temperature. [ABSTRACT FROM AUTHOR]
- Published
- 2020
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