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1. Effect of Si+ Ion Implantation in α-Ga2O3 Films on Their Gas Sensitivity

Author

Yakovlev, Nikita, primary, Almaev, Aleksei, additional, Butenko, Pavel, additional, Tetelbaum, David, additional, Mikhaylov, Alexey, additional, Nikolskaya, Alena, additional, Pechnikov, Aleksei, additional, Stepanov, Sergey, additional, Boiko, Mikhail, additional, Chikiryaka, Andrei, additional, and Nikolaev, Vladimir, additional

Published
2023
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