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We report near-stoichiometric (NS) Ti:Mg:LiNbO3 strip waveguides fabricated starting from a Z-cut pure congruent LiNbO3 substrate in sequence by Tiand MgO-diffusion and post vapor transport equilibration. These waveguides with an initial Ti-strip width of 4-8 μ.m well support transverse magnetic mode, are single-mode at 0.98and 1.5-μ.m wavelengths, have a smooth surface and a loss as low as 0.1 dB/cm at 1.5 μm. The waveguides are NS and optical-damage-resistant, and have a homogeneous Mg concentration of 1.7 ± 0.3 mol% in the guiding layer. Such a waveguide is promising for nonlinear integrated optics. [ABSTRACT FROM PUBLISHER]