1. One-Shot Exposure for Patterning Two-Dimensional Photonic Crystals to Enhance Light Extraction of InGaN-Based Green LEDs
- Author
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Mei-Li Hsieh, C.H. Lin, Kuo-Chang Lo, S.Y. Yang, Yi-Sheng Lan, Hao-Chung Kuo, and H.M. Liu
- Subjects
Materials science ,business.industry ,Light extraction in LEDs ,Wide-bandgap semiconductor ,Holography ,Backlight ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,law.invention ,Semiconductor laser theory ,Optics ,law ,Optoelectronics ,Electrical and Electronic Engineering ,business ,Photonic crystal ,Diode ,Light-emitting diode - Abstract
To promote the feasibility of using photonic crystals to enhance light extraction of light-emitting diodes (LEDs) for industrial applications, the request for the high-yield and simple exposure process to pattern two-dimensional photonic crystals (2DPCs) becomes rather urgent. In this work, we developed a one-shot three-beam laser interference system to fabricate a 2DPC on an InGaN-based green LED to address its performance for backlight display applications. Using the current exposure system we develop here, a submicro-patterned area of 6 mm in diameter can be achieved. The experimental results show that the operating voltage of a 1 times 1 mm2 in-area LED incorporated with the 2DPC is around 4 V, and the light extraction efficiency is enhanced by a factor of 2.1.
- Published
- 2008
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