1. A Miniatured Passive Low-Pass Filter With Ultrawide Stopband Based on 3-D Integration Technology
- Author
-
Xiaoxian Liu, Qijun Lu, Fengjuan Wang, Yintang Yang, Yang Liu, and Xiangkun Yin
- Subjects
Materials science ,business.industry ,Low-pass filter ,Stopband ,Condensed Matter Physics ,Capacitance ,Cutoff frequency ,Filter (video) ,Equivalent circuit ,Optoelectronics ,Insertion loss ,Electrical and Electronic Engineering ,business ,Passband - Abstract
By using integrated lumped elements based on through-silicon via (TSV) technology, a 3-D low-pass filter (LPF) with ultracompact size and ultrawide stopband is proposed. The 3-D magnetic coupling is enhanced between microsize spiral inductors to increase the mutual inductance and improve the high-frequency performance. A coaxial TSV with enhanced capacitance in high resistivity silicon (HRS) is utilized both as capacitor and as a vertical interconnection without any overhead in area and routing. The 3-D nature of the proposed filter yields a miniaturized size of 0.2 x 0.10 mm². The LPF is analyzed with equivalent circuit model and validated with the well-matched S-parameters obtained by finite element method simulation and measurement. With -3-dB cutoff frequency at 2.6 GHz, the LPF exhibits an insertion loss below 1 dB, a reflection loss over 17 dB in the passband, and a suppression level over 20 dB from 5.28 up to 40 GHz in the stopband.
- Published
- 2022