1. Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview
- Author
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Meryem Benelajla, Klaus J. Boller, Ronald Dekker, Albert van Rees, Rene Heideman, Robert Grootjans, Chris G. H. Roeloffzen, Denys Marchenko, Youwen Fan, Paulus W. L. van Dijk, Marcel Hoekman, Ilka Visscher, Caterina Taballione, R. B. Timens, Lennart Wevers, Leimeng Zhuang, Dimitri Geskus, David Marpaung, Andrea Alippi, Yang Liu, Jörn P. Epping, Kerstin Worhoff, Ruud M. Oldenbeuving, Edwin J. Klein, Erik Schreuder, Caterina Taddei, Arne Leinse, Douwe Geuzebroek, and Laser Physics & Nonlinear Optics
- Subjects
Optical fiber ,Computer science ,Optical communication ,Physics::Optics ,02 engineering and technology ,Integrated circuit ,01 natural sciences ,Waveguide (optics) ,Optical filters ,law.invention ,010309 optics ,Resonator ,020210 optoelectronics & photonics ,law ,Beam steering ,0103 physical sciences ,0202 electrical engineering, electronic engineering, information engineering ,Electrical and Electronic Engineering ,Optical filter ,Electronic circuit ,Optical communications ,business.industry ,Photonic integrated circuit ,Integrated optics ,Atomic and Molecular Physics, and Optics ,Optical waveguides ,Optoelectronics ,business ,lasers - Abstract
An overview of the most recent developments and improvements to the low-loss TriPleX Si3N4 waveguide technology is presented in this paper. The TriPleX platform provides a suite of waveguide geometries (box, double stripe, symmetric single stripe, and asymmetric double stripe) that can be combined to design complex functional circuits, but more important are manufactured in a single monolithic process flow to create a compact photonic integrated circuit. All functionalities of the integrated circuit are constructed using standard basic building blocks, namely straight and bent waveguides, splitters/combiners and couplers, spot size converters, and phase tuning elements. The basic functionalities that have been realized are: ring resonators and Mach–Zehnder interferometer filters, tunable delay elements, and waveguide switches. Combination of these basic functionalities evolves into more complex functions such as higher order filters, beamforming networks, and fully programmable architectures. Introduction of the active InP chip platform in a combination with the TriPleX will introduce light generation, modulation, and detection to the low-loss platform. This hybrid integration strategy enables fabrication of tunable lasers, fully integrated filters, and optical beamforming networks.
- Published
- 2018