Search

Your search keyword '"Hosoda, Hirokazu"' showing total 1 results
Start Over Author "Hosoda, Hirokazu" Journal extreme ultraviolet lithography 2020
1 results on '"Hosoda, Hirokazu"'

1. Update of >300W high power LPP-EUV source challenge for semiconductor HVM

Author

Mizoguchi, Hakaru, primary, Nakarai, Hiroaki, additional, Abe, Tamotsu, additional, Tanaka, Hiroshi, additional, Watanabe, Yukio, additional, Hori, Tsukasa, additional, Shiraishi, Yutaka, additional, Ueno, Yoshifumi, additional, Yanagida, Tatsuya, additional, Soumagne, Georg, additional, Yamada, Tsuyoshi, additional, Saitou, Takashi, additional, Hosoda, Hirokazu, additional, Tomuro, Hiroaki, additional, Nagai, Shinji, additional, Niimi, Gouta, additional, and Suganuma, Takashi, additional

Published
2020
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results