Author: "DeLong, K.W." / Journal: extreme ultraviolet lithography (tops) - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "DeLong, K.W." Journal extreme ultraviolet lithography (tops)

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1. Surface characterization of optics for EUV lithography

Author: Gaines, D. P., primary, Sweeney, D.W., additional, DeLong, K.W., additional, Vernon, S.P., additional, Baker, S.L., additional, Tichenor, D. A., additional, and Kestner, R., additional
Published: 1996
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