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An MEMS microwave power sensor with thermovoltage compensation and transformation is presented. The sensor obtains a thermovoltage which is linear to the input power, thanks to the Seebeck effect. However, the thermovoltage decreases as the frequency of input power increases due to the loss. The novelty is that the variation of thermovoltage has been compensated by an algorithm, and a transformation line is obtained to transform the thermovoltage to measured power displayed on liquid crystal display. The result indicates that the relative error is smaller than 1.5%. This system has practical applications in precise power measuring instruments. [ABSTRACT FROM AUTHOR]