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Vertical arrays of one-dimensional tin nanowires on silicon dioxide (SiO2)/silicon (Si) substrates have been developed as anode materials for lithium rechargeable microbatteries. The process is complementary metal-oxide-semiconductor (CMOS) compatible for fabricating on-chip microbatteries. Nanoporous anodized aluminum oxide (AAO) templates integrated on SiO2/Si substrates were employed for fabrication of tin nanowires resulting in high surface area of anodes. The microstructure of these nanowire arrays was investigated by scanning electron microscopy and X-ray diffraction. The electrochemical tests showed that the discharge capacity of about 400 mA h g−1 could be maintained after 15 cycles at the high discharge/charge rate of 4200 mA g−1. Keywords: Lithium microbattery, Anode material, Tin nanowire, Anodized aluminum oxide