Search

Your search keyword '"Yuxuru Ohji"' showing total 2 results
Start Over Author "Yuxuru Ohji" Journal ecs meeting abstracts
2 results on '"Yuxuru Ohji"'

2. Microscopic Understanding of PBTI and NBTI Mechanisms in High-k / Metal Gate Stacks

Author

Ryu Hasunuma, Takayuki Aoyama, Yasuo Nara, Keisaku Yamada, Motoyuki Sato, Yuxuru Ohji, Kenji Shiraishi, Seiji Inumiya, Chihiro Tamura, Kikuo Yamabe, and Seiichi Miyazaki

Subjects
Materials science, business.industry, Optoelectronics, business, High-κ dielectric
Abstract

We have established a comprehensive understanding of the PBTI and NBTI reliability of high-k/metal gate stacks. PBTI is found to exhibit a universal relationship, in terms of fast transient carrier traps and stress voltage, due to the formation of positive oxygen vacancies. The use of metal gates for Tinv scaling is promising for the improvement of drain current without PBTI lifetime degradation. However, in the case of NBTI, interface state degradation becomes more serious with Tinv scaling. Thus, the use of a high quality interfacial layer, such as a wet oxide interface, is a promising solution for the improvement of NBTI lifetime.

Published
2007

Catalog

Books, media, physical & digital resources
See catalog results