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This paper describes an innovative electro-acoustic coupling structure with a Patterned Piezoelectric film as Inter-Digital Transducer (PP-IDT) on the diamond substrate for Surface Acoustic Wave (SAW) devices of better quality factor and frequency resolution. Theoretical analysis and Finite Element Method (FEM) are employed to investigate the dependence of microwave impedance characters on the thickness of piezoelectric and metal electrode layers. The systematic studies show that the PP-IDT structure can excite the mechanical vibration on the top surface of diamond substrate and derive the SAW. The quality factor increases remarkably in excess to 104 since the SAW is propagating below the diamond surface with little interface loss and transmission loss. Unlabelled Image • Diamond based piezoelectric layer is patterned as inter-digital transducer. • Quality factor of surface acoustic wave devices can be improved greatly. • Thickness of piezoelectric and electrode layer affects the performance. • Maximum quality factor is observed at optimal electrode thickness. [ABSTRACT FROM AUTHOR]