1. Synthesis of diamond at sub 300 °C substrate temperature
- Author
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Piazza, F. and Morell, G.
- Subjects
- *
DIAMONDS , *SULFUR , *MOLYBDENUM , *CHEMICAL vapor deposition - Abstract
Abstract: Sulfur-assisted hot-filament chemical vapor deposition (HFCVD) was employed to grow nanocrystalline diamond at low substrate temperature, ∼300 °C, on molybdenum (Mo), and ∼250 °C, on polyimide film. The polyimide films remained flexible and strong after the deposition, clearly indicating that they did not experience temperatures near or above the glass transition temperature at ∼360 °C. The relative intensity of the diamond peak in the Raman spectra increases when the substrate temperature is decreased from ∼500 to ∼300 °C, a result that is inverted with respect to HFCVD without sulfur. This behavior was employed to obtain microcrystalline diamond on Mo at ∼270 °C. Profound changes induced to the gas phase chemistry and surface reactions when a trace amount of H2S is added to the HFCVD process seem to enable these results. [Copyright &y& Elsevier]
- Published
- 2007
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