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1. Toward controlling the Al2O3/ZnO interface properties by in situ ALD preparation

Author

Christoph Janowitz, Ali Mahmoodinezhad, Małgorzata Kot, Carlos Morales, Franziska Naumann, Paul Plate, Marvin Hartwig Zoellner, Florian Bärwolf, David Stolarek, Christian Wenger, Karsten Henkel, and Jan Ingo Flege

Subjects
Inorganic Chemistry
Abstract

The electronic band alignment of an alumina/zinc oxide thin-film heterostructure solely grown by atomic layer deposition has been determined by XPS/UPS depth profiling, correlating the electronic properties with the interface chemical composition.

Published
2022
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