1. Superconducting membrane mechanical oscillator based on vacuum-gap capacitor.
- Author
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Yong-Chao Li, Xin Dai, Jun-Liang Jiang, Jia-Zheng Pan, Xing-Yu Wei, Ya-Peng Lu, Sheng Lu, Xue-Cou Tu, Guo-Zhu Sun, and Pei-Heng Wu
- Subjects
PHOTORESISTS ,CAPACITORS ,ALUMINUM films ,ELECTRICAL harmonics ,COMPUTER simulation - Abstract
Using the diluted S1813 UV photoresist as a sacrificial layer, we successfully fabricate a superconducting suspended parallel-plate capacitor, in which the top layer of aluminum film acts as a membrane mechanical resonator. Together with a superconducting octagonal spiral inductor, this parallel-plate capacitor constitutes a superconducting microwave resonator. At mK temperature, the transmission characteristic and spectrum of the microwave resonator are measured. Sideband frequencies caused by the vibration of the membrane mechanical resonator are clearly demonstrated. By down-converting with a mixer, the dependence of fundamental frequency and its harmonics on the input microwave power are clearly demonstrated, which is consistent with the numerical simulation. [ABSTRACT FROM AUTHOR]
- Published
- 2018
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