22 results on '"Ming Xue"'
Search Results
2. Measuring Loschmidt echo via Floquet engineering in superconducting circuits
- Author
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Shou-Kuan Zhao, Zi-Yong Ge, Zhong-Cheng Xiang, Guang-Ming Xue, Hai-Sheng Yan, Zi-Ting Wang, Zhan Wang, Hui-Kai Xu, Fei-Fan Su, Zhao-Hua Yang, He Zhang, Yu-Ran Zhang, Xue-Yi Guo, Kai Xu, Ye Tian, Hai-Feng Yu, Dong-Ning Zheng, Heng Fan, and Shi-Ping Zhao
- Subjects
General Physics and Astronomy ,Quantum Physics - Abstract
The Loschmidt echo is a useful diagnostic for the perfection of quantum time-reversal process and the sensitivity of quantum evolution to small perturbations. The main challenge for measuring the Loschmidt echo is the time reversal of a quantum evolution. In this work, we demonstrate the measurement of the Loschmidt echo in a superconducting 10-qubit system using Floquet engineering and discuss the imperfection of an initial Bell-state recovery arising from the next-nearest-neighbor (NNN) coupling present in the qubit device. Our results show that the Loschmidt echo is very sensitive to small perturbations during quantum-state evolution, in contrast to the quantities like qubit population that is often considered in the time-reversal experiment. These properties may be employed for the investigation of multiqubit system concerning many-body decoherence and entanglement, etc., especially when devices with reduced or vanishing NNN coupling are used.
- Published
- 2022
- Full Text
- View/download PDF
3. Realization of adiabatic and diabatic CZ gates in superconducting qubits coupled with a tunable coupler*
- Author
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Jiaxiu Han, Huikai Xu, Yirong Jin, Teng Ma, Guang-Ming Xue, Zhen Yang, Weiyang Liu, Zhiyuan Li, Yongchao Li, Mo Chen, Kehuan Linghu, Jingning Zhang, Haifeng Yu, and Junhua Wang
- Subjects
Physics ,Superconductivity ,Quantum Physics ,Qubit ,Quantum mechanics ,Diabatic ,FOS: Physical sciences ,General Physics and Astronomy ,Quantum Physics (quant-ph) ,Adiabatic process ,Realization (systems) - Abstract
High fidelity two-qubit gates are fundamental for scaling up the superconducting qubit number. We use two qubits coupled via a frequency-tunable coupler which can adjust the coupling strength, and demonstrate the CZ gate using two different schemes, adiabatic and diabatic methods. The Clifford based randomized benchmarking (RB) method is used to assess and optimize the CZ gate fidelity. The fidelities of adiabatic and diabatic CZ gates are 99.53(8)% and 98.72(2)%, respectively. We also analyze the errors induced by the decoherence. Comparing to 30 ns duration time of adiabatic CZ gate, the duration time of diabatic CZ gate is 19 ns, revealing lower incoherence error rate r ′ incoherent , int = 0.0197 ( 5 ) compared to r incoherent, int = 0.0223(3).
- Published
- 2021
- Full Text
- View/download PDF
4. Forebody asymmetric vortex control with extended dielectric barrier discharge plasma actuators*
- Author
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Ming Xue, Borui Zheng, and Chang Ge
- Subjects
Physics ,Reduced frequency ,General Physics and Astronomy ,02 engineering and technology ,Mechanics ,Dielectric barrier discharge ,021001 nanoscience & nanotechnology ,01 natural sciences ,Vortex ,Ion wind ,Flow separation ,Particle image velocimetry ,0103 physical sciences ,010306 general physics ,0210 nano-technology ,Plasma actuator ,Wind tunnel - Abstract
Plasma control of forebody asymmetric vortices is mostly achieved by means of dielectric barrier discharge (DBD) plasma actuators. However, DBD actuators suffer from some disadvantages such as a weak induced body force, a single-direction induced jet, and an unclear control mechanism. We carry out wind tunnel experiments involving the forebody vortex control of a slender body at high angles of attack using an innovative extended DBD actuator, which has a stronger capacity to induce an electric wind than a DBD actuator. Through synchronous measurements of the pressure distribution and particle image velocimetry (PIV), the spatiotemporal evolution of the dynamic interactions between plasma-actuation-induced vortices and forebody asymmetric vortices is analyzed. The influence of plasma discharge on the boundary layer separation around a slender body and the spatial topological structures of asymmetric vortices are further surveyed, as the optimized actuation parameters. Extended DBD actuators are found to be more capable of controlling asymmetric vortices than DBD actuators, and a linear proportionality of the sectional lateral force versus the duty ratio is achieved. There exists an optimal normalized reduced frequency (f + = 2π f p d/U ∞ = 2.39) for asymmetric vortex control under the present experimental conditions. The research results can provide technical guidance for the control and reuse of forebody asymmetric vortices.
- Published
- 2020
- Full Text
- View/download PDF
5. Dynamic evolution of vortex structures induced by tri-electrode plasma actuator*
- Author
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Ming Xue, Borui Zheng, and Chang Ge
- Subjects
Materials science ,Electrode ,General Physics and Astronomy ,Dielectric barrier discharge ,Vorticity ,Plasma actuator ,Molecular physics ,Vortex - Abstract
Plasma flow control is a new type of active flow control approach based on plasma pneumatic actuation. Dielectric barrier discharge (DBD) actuators have become a focus of international aerodynamic research. However, the practical applications of typical DBDs are largely restricted due to their limited discharge area and low relative-induced velocity. The further improvement of performance will be beneficial for engineering applications. In this paper, high-speed schlieren and high-speed particle image velocimetry (PIV) are employed to study the flow field induced by three kinds of plasma actuations in a static atmosphere, and the differences in induced flow field structure among typical DBD, extended DBD (EX-DBD), and tri-electrode sliding discharge (TED) are compared. The analyzing of the dynamic evolution of the maximum horizontal velocity over time, the velocity profile at a fixed horizontal position, and the momentum and body force in a control volume reveals that the induced velocity peak value and profile velocity height of EX-DBD are higher than those of the other two types of actuation, suggesting that EX-DBD actuation has the strongest temporal aerodynamic effect among the three types of actuations. The TED actuation not only can enlarge the plasma extension but also has the longest duration in the entire pulsed period and the greatest influence on the height and width of the airflow near the wall surface. Thus, the TED actuation has the ability to continuously influencing a larger three-dimensional space above the surface of the plasma actuator.
- Published
- 2020
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- View/download PDF
6. Degradation behavior of electrical properties of GaInAs (1.0 eV) and GaInAs (0.7 eV) sub-cells of IMM4J solar cells under 1-MeV electron irradiation
- Author
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Zhang, Yan-Qing, primary, Ho, Ming-Xue, additional, Wu, Yi-Yong, additional, Sun, Cheng-Yue, additional, Zhao, Hui-Jie, additional, Geng, Hong-Bin, additional, Wang, Shuai, additional, Liu, Ru-Bin, additional, and Sun, Qiang, additional
- Published
- 2017
- Full Text
- View/download PDF
7. Degradation behavior of electrical properties of GaInAs (1.0 eV) and GaInAs (0.7 eV) sub-cells of IMM4J solar cells under 1-MeV electron irradiation
- Author
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Hongbin Geng, Chengyue Sun, Huijie Zhao, Wang Shuai, Yanqing Zhang, Qiang Sun, Ru-Bin Liu, Ming-Xue Ho, and Yiyong Wu
- Subjects
Materials science ,business.industry ,0103 physical sciences ,Electron beam processing ,General Physics and Astronomy ,Optoelectronics ,Degradation (geology) ,02 engineering and technology ,021001 nanoscience & nanotechnology ,010306 general physics ,0210 nano-technology ,business ,01 natural sciences - Published
- 2017
- Full Text
- View/download PDF
8. Enhancement in solar hydrogen generation efficiency using InGaN photoelectrode after surface roughening treatment with nano-sized Ni mask
- Author
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Tao, Tao, primary, Zhi, Ting, additional, Li, Ming-Xue, additional, Xie, Zi-Li, additional, Zhang, Rong, additional, Liu, Bin, additional, Li, Yi, additional, Zhuang, Zhe, additional, Zhang, Guo-Gang, additional, Jiang, Fu-Long, additional, Chen, Peng, additional, and Zheng, You-Dou, additional
- Published
- 2014
- Full Text
- View/download PDF
9. Fabrication of rhenium Josephson junctions
- Author
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Ye Tian, Hong-Wei Yu, Guang-Ming Xue, Yu-Feng Ren, Haifeng Yu, Shi-Ping Zhao, and Weiyang Liu
- Subjects
Superconductivity ,Josephson effect ,Flux qubit ,Materials science ,Fabrication ,Condensed matter physics ,General Physics and Astronomy ,chemistry.chemical_element ,Rhenium ,Pi Josephson junction ,Condensed Matter::Materials Science ,chemistry ,Condensed Matter::Superconductivity ,Qubit ,Superconducting quantum computing - Abstract
Rhenium is a superconductor with a relatively weak tendency to oxidize, which is advantageous in superconducting quantum circuit and qubit applications. In this work, Re/Al—AlOx/Re Josephson tunnel junctions were fabricated using a selective film-etching process similar to that developed in Nb trilayer technology. The Re films had a superconducting transition temperature of 4.8 K and a transition width of 0.2 K. The junctions were found to be highly reproducible using the fabrication process and their characteristics had good quality with a low leakage current and showed a superconducting gap of 0.55 meV.
- Published
- 2013
- Full Text
- View/download PDF
10. Spectroscopy and coherent manipulation of single and coupled flux qubits
- Author
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Yulin Wu, Ye Tian, Haifeng Yu, Yirong Jin, Jie Li, Guang-Ming Xue, Shi-Ping Zhao, Keqiang Huang, Hui Deng, and Dongning Zheng
- Subjects
Physics ,Flux qubit ,Charge qubit ,Rabi cycle ,General Physics and Astronomy ,Quantum Physics ,Phase qubit ,Computer Science::Emerging Technologies ,Qubit ,Quantum mechanics ,Atomic physics ,Quantum information ,Superconducting quantum computing ,Quantum computer - Abstract
Measurements of three-junction flux qubits, both single flux qubits and coupled flux qubits, using a coupled direct current superconducting quantum interference device (dc-SQUID) for readout are reported. The measurement procedure is described in detail. We performed spectroscopy measurements and coherent manipulations of the qubit states on a single flux qubit, demonstrating quantum energy levels and Rabi oscillations, with Rabi oscillation decay time TRabi = 78 ns and energy relaxation time T1 = 315 ns. We found that the value of TRabi depends strongly on the mutual inductance between the qubit and the magnetic coil. We also performed spectroscopy measurements on inductively coupled flux qubits.
- Published
- 2013
- Full Text
- View/download PDF
11. Characterizing neural activities evoked by manual acupuncture through spiking irregularity measures
- Author
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Xile Wei, Ming Xue, Haitao Yu, Bin Deng, Chen Yingyuan, and Jiang Wang
- Subjects
Quantitative Biology::Neurons and Cognition ,business.industry ,General Physics and Astronomy ,Pattern recognition ,Zusanli ,Shape parameter ,Interval (music) ,Histogram ,Gamma distribution ,Acupuncture ,Neural system ,Spike (software development) ,Artificial intelligence ,business ,Mathematics - Abstract
The neural system characterizes information in external stimulations by different spiking patterns. In order to examine how neural spiking patterns are related to acupuncture manipulations, experiments are designed in such a way that different types of manual acupuncture (MA) manipulations are taken at the 'Zusanli' point of experimental rats, and the induced electrical signals in the spinal dorsal root ganglion are detected and recorded. The interspike interval (ISI) statistical histogram is fitted by the gamma distribution, which has two parameters: one is the time-dependent firing rate and the other is a shape parameter characterizing the spiking irregularities. The shape parameter is the measure of spiking irregularities and can be used to identify the type of MA manipulations. The coefficient of variation is mostly used to measure the spike time irregularity, but it overestimates the irregularity in the case of pronounced firing rate changes. However, experiments show that each acupuncture manipulation will lead to changes in the firing rate. So we combine four relatively rate-independent measures to study the irregularity of spike trains evoked by different types of MA manipulations. Results suggest that the MA manipulations possess unique spiking statistics and characteristics and can be distinguished according to the spiking irregularity measures. These studies have offered new insights into the coding processes and information transfer of acupuncture.
- Published
- 2013
- Full Text
- View/download PDF
12. Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process
- Author
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Dongning Zheng, Guang-Ming Xue, Haifeng Yu, Shi-Ping Zhao, Hui Deng, Ye Tian, Yulin Wu, Ying-Fei Chen, and Jie Li
- Subjects
Josephson effect ,Pi Josephson junction ,Phase qubit ,Flux qubit ,Materials science ,Condensed matter physics ,Condensed Matter::Superconductivity ,Rapid single flux quantum ,General Physics and Astronomy ,Superconducting tunnel junction ,Macroscopic quantum phenomena ,Superconducting quantum computing - Abstract
Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks: Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density (jc) and wide range of junction sizes from 0.01 μm2 up to 1 μm2. We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for superconducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubits and charge-flux qubits.
- Published
- 2013
- Full Text
- View/download PDF
13. Flux qubit with a large loop size and tunable Josephson junctions
- Author
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Dongning Zheng, Ye Tian, Hui Deng, Keqiang Huang, Haifeng Yu, Guang-Ming Xue, Shi-Ping Zhao, Jian-Kun Ren, and Yulin Wu
- Subjects
Inductance ,Pi Josephson junction ,Phase qubit ,Physics ,Josephson effect ,Flux qubit ,Charge qubit ,Condensed matter physics ,Condensed Matter::Superconductivity ,Qubit ,General Physics and Astronomy ,Superconducting tunnel junction ,Condensed Matter::Mesoscopic Systems and Quantum Hall Effect - Abstract
We present the design of a superconducting flux qubit with a large loop inductance. The large loop inductance is desirable for coupling between qubits. The loop is configured into a gradiometer form that could reduce the interference from environmental magnetic noise. A combined Josephson junction, i.e., a DC-SQUID is used to replace the small Josephson junction in the usual 3-JJ (Josephaon junction) flux qubit, leading to a tunable energy gap by using an independent external flux line. We perform numerical calculations to investigate the dependence of the energy gap on qubit parameters such as junction capacitance, critical current, loop inductance, and the ratio of junction energy between small and large junctions in the flux qubit. We suggest a range of values for the parameters.
- Published
- 2012
- Full Text
- View/download PDF
14. Damage of low-energy ion irradiation on copper nanowire: molecular dynamics simulation
- Author
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Xue-Qing, Zou, primary, Jian-Ming, Xue, additional, and Yu-Gang, Wang, additional
- Published
- 2010
- Full Text
- View/download PDF
15. The effect of composition on structural and electronic properties in polycrystalline CuGaSe 2 thin film
- Author
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Li, Zhang, primary, Qing, He, additional, Chuan-Ming, Xu, additional, Yu-Ming, Xue, additional, Chang-Jian, Li, additional, and Yun, Sun, additional
- Published
- 2008
- Full Text
- View/download PDF
16. Mechanical properties of self-irradiated single-crystal copper.
- Author
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Wei-Na, Li, Jian-Ming, Xue, Jian-Xiang, Wang, and Hui-Ling, Duan
- Subjects
- *
MECHANICAL properties of metals , *COPPER , *IRRADIATION , *INTERSTITIAL defects , *MOLECULAR dynamics - Abstract
Molecular dynamics simulations are performed to investigate the influence of irradiation damage on the mechanical properties of copper. In the simulation, the energy of primary knocked-on atoms (PKAs) ranges from 1 to 10 keV, and the results indicate that the number of point defects (vacancies and interstitials) increases linearly with the PKA energy. We choose three kinds of simulation samples: un-irradiated and irradiated samples, and comparison samples. The un-irradiated samples are defect-free, while irradiation induces vacancies and interstitials in the irradiated samples. It is found that due to the presence of the irradiation-induced defects, the compressive Young modulus of the single-crystal Cu increases, while the tensile Young modulus decreases, and that both the tensile and compressive yield stresses experience a dramatic decrease. To analyze the effects of vacancies and interstitials independently, the mechanical properties of the comparison samples, which only contain randomly distributed vacancies, are investigated. The results indicate that the vacancies are responsible for the change of Young modulus, while the interstitials determine the yield strain. [ABSTRACT FROM AUTHOR]
- Published
- 2014
- Full Text
- View/download PDF
17. Characterizing neural activities evoked by manual acupuncture through spiking irregularity measures.
- Author
-
Ming, Xue, Jiang, Wang, Bin, Deng, Xi-Le, Wei, Hai-Tao, Yu, and Ying-Yuan, Chen
- Subjects
- *
ACUPUNCTURE , *GAMMA distributions , *ALTERNATIVE medicine , *CONTINUOUS distributions , *ACTION potentials - Abstract
The neural system characterizes information in external stimulations by different spiking patterns. In order to examine how neural spiking patterns are related to acupuncture manipulations, experiments are designed in such a way that different types of manual acupuncture (MA) manipulations are taken at the ‘Zusanli’ point of experimental rats, and the induced electrical signals in the spinal dorsal root ganglion are detected and recorded. The interspike interval (ISI) statistical histogram is fitted by the gamma distribution, which has two parameters: one is the time-dependent firing rate and the other is a shape parameter characterizing the spiking irregularities. The shape parameter is the measure of spiking irregularities and can be used to identify the type of MA manipulations. The coefficient of variation is mostly used to measure the spike time irregularity, but it overestimates the irregularity in the case of pronounced firing rate changes. However, experiments show that each acupuncture manipulation will lead to changes in the firing rate. So we combine four relatively rate-independent measures to study the irregularity of spike trains evoked by different types of MA manipulations. Results suggest that the MA manipulations possess unique spiking statistics and characteristics and can be distinguished according to the spiking irregularity measures. These studies have offered new insights into the coding processes and information transfer of acupuncture. [ABSTRACT FROM AUTHOR]
- Published
- 2013
- Full Text
- View/download PDF
18. Spectroscopy and coherent manipulation of single and coupled flux qubits.
- Author
-
Yu-Lin, Wu, Hui, Deng, Ke-Qiang, Huang, Ye, Tian, Hai-Feng, Yu, Guang-Ming, Xue, Yi-Rong, Jin, Jie, Li, Shi-Ping, Zhao, and Dong-Ning, Zheng
- Subjects
QUANTUM computing ,COMPUTER science ,QUBITS ,SUPERCONDUCTING quantum interference devices ,QUANTUM interference devices - Abstract
Measurements of three-junction flux qubits, both single flux qubits and coupled flux qubits, using a coupled direct current superconducting quantum interference device (dc-SQUID) for readout are reported. The measurement procedure is described in detail. We performed spectroscopy measurements and coherent manipulations of the qubit states on a single flux qubit, demonstrating quantum energy levels and Rabi oscillations, with Rabi oscillation decay time T
Rabi = 78 ns and energy relaxation time T1 = 315 ns. We found that the value of TRabi depends strongly on the mutual inductance between the qubit and the magnetic coil. We also performed spectroscopy measurements on inductively coupled flux qubits. [ABSTRACT FROM AUTHOR]- Published
- 2013
- Full Text
- View/download PDF
19. Fabrication of rhenium Josephson junctions.
- Author
-
Guang-Ming, Xue, Hai-Feng, Yu, Ye, Tian, Wei-Yang, Liu, Hong-Wei, Yu, Yu-Feng, Ren, and Shi-Ping, Zhao
- Subjects
- *
RHENIUM , *SUPERCONDUCTORS , *QUBITS , *JOSEPHSON junctions , *FABRICATION (Manufacturing) - Abstract
Rhenium is a superconductor with a relatively weak tendency to oxidize, which is advantageous in superconducting quantum circuit and qubit applications. In this work, Re/Al—AlOx/Re Josephson tunnel junctions were fabricated using a selective film-etching process similar to that developed in Nb trilayer technology. The Re films had a superconducting transition temperature of 4.8 K and a transition width of 0.2 K. The junctions were found to be highly reproducible using the fabrication process and their characteristics had good quality with a low leakage current and showed a superconducting gap of 0.55 meV. [ABSTRACT FROM AUTHOR]
- Published
- 2013
- Full Text
- View/download PDF
20. Degradation behavior of electrical properties of GaInAs (1.0 eV) and GaInAs (0.7 eV) sub-cells of IMM4J solar cells under 1-MeV electron irradiation.
- Author
-
Yan-Qing Zhang, Ming-Xue Ho, Yi-Yong Wu, Cheng-Yue Sun, Hui-Jie Zhao, Hong-Bin Geng, Shuai Wang, Ru-Bin Liu, and Qiang Sun
- Subjects
- *
CHEMICAL decomposition , *ELECTRIC properties of crystals , *INDIUM gallium arsenide , *SOLAR cells , *ELECTRON beams , *PHOTOLUMINESCENCE , *SEMICONDUCTOR junctions - Abstract
In this work the degradation effects of the GaInAs (1.0 eV) and GaInAs (0.7 eV) sub-cells for IMM4J solar cells are investigated after 1-MeV electron irradiation by using spectral response and photoluminescence (PL) signal amplitude analysis, as well as electrical property measurements. The results show that, compared with the electrical properties of traditional single junction (SJ) GaAs (1.41 eV) solar cell, the electrical properties (such as , , and of the newly sub-cells degrade similarly as a function of , where represents the electron fluence. It is found that the degradation of is much more than that of in the irradiated GaInAs (0.7 eV) cells due to the additional intrinsic layer, leading to more serious damage to the space charge region. However, of the three types of SJ cells with the gap widths of 0.7, 1.0, and 1.4 eV, the electric properties of the GaInAs (1.0 eV) cell decrease largest under each irradiation fluence. Analysis on the spectral response indicates that the of the GaInAs (1.0 eV) cell also shows the most severe damage. The PL amplitude measurements qualitatively confirm that the degradation of the effective minority carrier life-time ( in the SJ GaInAs cells is more drastic than that of SJ GaAs cells during the irradiation. Thus, the output current of GaInAs sub-cell should be controlled in the irradiated IMM4J cells. [ABSTRACT FROM AUTHOR]
- Published
- 2017
- Full Text
- View/download PDF
21. Theoretical investigation on radiation tolerance of phases.
- Author
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Ke-Di Yin, Xi-Tong Zhang, Qing Huang, and Jian-Ming Xue
- Subjects
TERNARY phase diagrams ,NUCLEAR reactors ,NUCLEAR energy ,RADIATION ,IRRADIATION - Abstract
Ternary phases with layered hexagonal structures, as candidate materials used for next-generation nuclear reactors, have shown great potential in tolerating radiation damage due to their unique combination of ceramic and metallic properties. However, materials behave differently in amorphization when exposed to energetic neutron and ion irradiations in experiment. We first analyze the irradiation tolerances of different (MAX) phases in terms of electronic structure, including the density of states (DOS) and charge density map. Then a new method based on the Bader analysis with the first-principle calculation is used to estimate the stabilities of MAX phases under irradiation. Our calculations show that the substitution of Cr/V/Ta/Nb by Ti and Si/Ge/Ga by Al can increase the ionicities of the bonds, thus strengthening the radiation tolerance. It is also shown that there is no obvious difference in radiation tolerance between and due to the similar charge transfer values of C and N atoms. In addition, the improved radiation tolerance from Ti
3 AlC2 to Ti2 AlC (Ti3 AlC2 and Ti2 AlC have the same chemical elements), can be understood in terms of the increased Al/TiC layer ratio. Criteria based on the quantified charge transfer can be further used to explore other phases with respect to their radiation tolerance, playing a critical role in choosing appropriate MAX phases before they are subjected to irradiation in experimental test for future nuclear reactors. [ABSTRACT FROM AUTHOR]- Published
- 2017
- Full Text
- View/download PDF
22. High quality factor superconducting coplanar waveguide fabricated with TiN.
- Author
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Qiang Liu, Guang-Ming Xue, Xin-Sheng Tan, Hai-Feng Yu, and Yang Yu
- Subjects
- *
COPLANAR waveguides , *QUALITY factor , *WAVEGUIDES , *TIN compounds , *FABRICATION (Manufacturing) , *STANDARDS - Abstract
We fabricated TiN coplanar waveguides using standard lithography techniques followed by ICP etch. In order to achieve high quality factor, we investigated the film growth by choosing different deposition conditions for various substrates. Quality factors of waveguide resonators were measured at 20 mK in both high and low microwave power limits. An inner quality factor of several million was achieved at high power limit for a predominantly (200)-oriented TiN film which was grown on HF cleaned silicon wafer. A quality factor of larger than one million was achieved at high power limit for TiN film grown on sapphire. [ABSTRACT FROM AUTHOR]
- Published
- 2017
- Full Text
- View/download PDF
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