Author: "Miikkulainen, Ville" / Journal: chemical vapor deposition - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Miikkulainen, Ville"' showing total 2 results

Start Over Author "Miikkulainen, Ville" Journal chemical vapor deposition

2 results on '"Miikkulainen, Ville"'

1. Bis(tert‐butylimido)‐bis(dialkylamido) Complexes of Molybdenum as Atomic Layer Deposition (ALD) Precursors for Molybdenum Nitride: the Effect of the Alkyl Group

Author: Miikkulainen, Ville, primary, Suvanto, Mika, additional, and Pakkanen, Tapani A., additional
Published: 2008
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2. Bis( tert-butylimido)-bis(dialkylamido) Complexes of Molybdenum as Atomic Layer Deposition (ALD) Precursors for Molybdenum Nitride: the Effect of the Alkyl Group.

Author: Miikkulainen, Ville, Suvanto, Mika, and Pakkanen, Tapani A.
Published: 2008
Full Text: View/download PDF

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