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Start Over "Grzegorz Lupina" Topic materials science Journal chemical vapor deposition
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1. Deposition of BaHfO3Dielectric Layers for Microelectronic Applications by Pulsed Liquid Injection MOCVD

Author

Piotr Dudek, Grzegorz Lupina, Hans-Joachim Müssig, Christian Wenger, V. Kubilius, Mindaugas Lukosius, Adulfas Abrutis, Grzegorz Kozlowski, Z. Saltyte, Tomas Katkus, and Raimondas Galvelis

Subjects
Materials science, Liquid injection, business.industry, Process Chemistry and Technology, Optoelectronics, Microelectronics, Surfaces and Interfaces, General Chemistry, Dielectric, Metalorganic vapour phase epitaxy, business, Deposition (chemistry)
Published
2009
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