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[Display omitted] • H-SiO 2 and PF as fillers to improve the dielectric properties of PFS films. • The performance of TENGs delivered an enhancement by 13 times. • Multiple nanoscales is more favorable to achieve high performance of TENGs. Triboelectric nanogenerators (TENGs), capable of harvesting distributed energy from the environment, have provided a viable solution for self-powered wearable electronics. However, their low power density and susceptibility to contamination still severely limit their practical application. Herein, we reported a "two-step" strategy to implement a waterproof self-powered wearable electronic device based on TENG. Firstly, Perfluoropolyether (PF) and hollow hierarchical silica (H-SiO 2) as fillers significantly improve the dielectric properties of polydimethylsiloxane (PDMS) composite films (PFS films) through polarization effect. Then the nano bumps of 10–30 nm are created on the surface of the films by surface etching, the bumps can increase the contact area of TENG. The voltage of TENG is improved from ∼ 67 V to ∼ 910 V and the current is improved from ∼ 1 μA to ∼ 25 μA. What's more, the investigation of the surface structure of the PFS composite films by Atomic Force Microscope (AFM) revealed that the synergistic combination of multiple nanoscales (10–30 nm, 60–80 nm, 300–500 nm) is more favorable to achieve high performance of TENG. The surface structure composed of multiple nanoscales endows PFS with excellent superhydrophobicity. The PFS films remained fine performance after 40,000 drops of water and 90 days. This work achieves high performance and water resistance of TENG, demonstrating great potential in the field of self-powered wearable electronic devices. [ABSTRACT FROM AUTHOR]