1. Micromachined phase-shifted array-type Mirau interferometer for swept-source OCT imaging: design, microfabrication and experimental validation
- Author
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Justine Lullin, M. Weimer, Joerg Froemel, Jean-Marc Cote, Sylwester Bargiel, Jaroslaw Rutkowski, Wei Shan Wang, Johann Krauter, Christophe Gorecki, Wolfgang Osten, Olivier Gaiffe, Jorge Albero, Stéphane Perrin, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Centre Hospitalier Régional Universitaire de Besançon (CHRU Besançon), Institut für Technische Optik [Universität Stuttgart], Universität Stuttgart [Stuttgart], Fraunhofer Institute for Electronic Nano Systems (Fraunhofer ENAS), and Fraunhofer (Fraunhofer-Gesellschaft)
- Subjects
Computer science ,Array data type ,01 natural sciences ,Article ,[SPI.MAT]Engineering Sciences [physics]/Materials ,010309 optics ,03 medical and health sciences ,Microactuator ,Optics ,Optical coherence tomography ,0103 physical sciences ,Medical imaging ,medicine ,Sensitivity (control systems) ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,030304 developmental biology ,[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] ,0303 health sciences ,medicine.diagnostic_test ,business.industry ,Mirau interferometer ,Atomic and Molecular Physics, and Optics ,Interferometry ,business ,Biotechnology ,Microfabrication - Abstract
International audience; OCT instruments permit fast and non-invasive 3D optical biopsies of biological tissues. However, they are bulky and expensive, making them only affordable at the hospital and thus, not sufficiently used as an early diagnostic tool. Significant reduction of system cost and size is achieved by implementation of MOEMS technologies. We propose an active array of 4x4 Mirau microinterferometers where the reference micro-mirrors are carried by a vertical comb-drive microactuator, enabling the implementation of the phase-shifting technique that improves the sensitivity and eliminates unwanted interferometric terms. We focus on the design of the imaging system, the microfabrication and the assembly of the Mirau microinterferometer, and the swept-source OCT imaging.
- Published
- 2019
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