1. Multilevel phase transition behavior of In2Se3-doped with Sb materials based on flexible polyimide substrate.
- Author
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Su, Feng and Hu, Yifeng
- Subjects
- *
PHASE change memory , *PHASE transitions , *PHASE change materials , *SUBSTRATES (Materials science) , *MAGNETRON sputtering - Abstract
[Display omitted] • The material is prepared on a flexible polyimide and has good bending resistance. • The material can undergo multistage phase transition, which can effectively improve the storage density. • The material has extremely low resistance drift, and the electronic structure remains essentially unchanged after aging testing. • The device can achieve reversible SET/RESET operation before and after bending without being affected. The In 2 Se 3 -doped Sb phase change material was deposited onto a polyimide substrate using magnetron sputtering technique. A comprehensive investigation was conducted on the thermal stability, bending resistance, crystal structure, and electrical properties of this material. The findings revealed its remarkable thermal stability, data retention, and bending resilience, particularly in the In 0.05 Se 0.19 Sb 0.76 film, which exhibited minimal resistance drift. The aging test confirmed the stability of the electronic structure in In 2 Se 3 -doped Sb, accompanied by reduced structural relaxation. Notably, no new crystalline phase emerged in In 0.05 Se 0.19 Sb 0.76 film, but stronger In-Sb bonds were formed. Raman spectroscopy and bending tests further indicated that deformation had minimal impact on the film's structure and surface. Utilizing the In 0.05 Se 0.19 Sb 0.76 material and polyimide substrate, a flexible phase change memory device demonstrated reliable SET/RESET operations even after bending, offering three stable resistance states for multilevel storage. This enhanced the storage density, making In 2 Se 3 -doped Sb material a promising flexible phase change material with excellent performance and vast potential for applications in phase change storage, such as electronic fabrics and flexible smart wearable electronics. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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