1. Structural and chemical investigation of surface and interface of multilayer optical coatings deposited by DIBS
- Author
-
Leander Tapfer, Antonella Rizzo, Salvatore Scaglione, L. Mirenghi, Maria Cristina Ferrara, Lorenzo Vasanelli, and Marco Alvisi
- Subjects
Surface (mathematics) ,business.industry ,Atomic force microscopy ,Chemistry ,Interface (computing) ,General Physics and Astronomy ,Surfaces and Interfaces ,General Chemistry ,engineering.material ,Condensed Matter Physics ,Surfaces, Coatings and Films ,X-ray reflectivity ,Optical coating ,Optics ,X-ray photoelectron spectroscopy ,Coating ,Surface roughness ,engineering ,Optoelectronics ,business - Abstract
The investigation of the surface and interface of a multilayer coating is a key factor for producing high quality optical device. In this work, we present a non-destructive technique as X-ray reflectivity to study deeply the chemical and structural quality of the multilayer. XPS depth profile analysis and AFM images have been used to evaluate the chemical intermixing and the surface roughness in order to verify the X-ray results.
- Published
- 2000
- Full Text
- View/download PDF