1. In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition
- Author
-
Chi-Ta Chia, I.-N. Lin, Hsiu-Fung Cheng, C. C. Chiu, C. C. Wu, and Chia-Liang Cheng
- Subjects
Pulsed laser ,In situ ,Materials science ,Diamond-like carbon ,Hydrogen ,Annealing (metallurgy) ,Analytical chemistry ,General Physics and Astronomy ,chemistry.chemical_element ,Surfaces and Interfaces ,General Chemistry ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Pulsed laser deposition ,symbols.namesake ,chemistry ,symbols ,Hydrogen etching ,Raman spectroscopy - Abstract
Atomic hydrogen etching on the pulsed laser deposited (PLD) diamond-like carbon (DLC) films were examined in situ by using Raman spectroscopy. Thermal annealing of the as-prepared DLC films was found to alter the D-band (∼1355 cm −1 ) and G-band (∼1582 cm −1 ) from unresolved features at room temperature to clearly separated bands at above 500°C, indicating graphitization of the films. The presence of atomic hydrogen retards graphitization at temperatures lower than 500°C, presumably because reactive atomic hydrogen formed sp 3 -bonding carbons which prevented graphitization at below 500°C, while at above 500°C, the hydrogen etches away disordered structure of the DLC film as the intensity changes of the D-bands demonstrate.
- Published
- 2001