1. Local structure study of GeMn recrystallization process by helium ion beam-induced epitaxial crystallization
- Author
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Chien-Hsu Chen, C. P. Lee, and H. Niu
- Subjects
Materials science ,Ion beam ,Annealing (metallurgy) ,Analytical chemistry ,General Physics and Astronomy ,Recrystallization (metallurgy) ,Surfaces and Interfaces ,General Chemistry ,Condensed Matter Physics ,Physics::Geophysics ,Surfaces, Coatings and Films ,law.invention ,Condensed Matter::Materials Science ,symbols.namesake ,Crystallography ,law ,Transmission electron microscopy ,symbols ,Thin film ,Crystallization ,Raman spectroscopy ,Raman scattering - Abstract
In this study, GeMn thin films were fabricated by implantation of Mn ions at room temperature. Post-annealing was performed using 2 MeV of He+ ion irradiation. The recrystallization phenomena of the GeMn thin films were analyzed by Raman scattering. High-resolution transmission electron microscopy was also used to characterize the recrystallization process before and after ion beam annealing. A structure phase transition-like behavior of the recrystallization process of GeMn thin films was observed in the Raman spectra.
- Published
- 2015