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Abstract: In this work, hydrogen etching method is applied to improve the quality of nano-crystalline diamond (NCD) films grown from hot-filament assisted chemical vapor deposition (HFCVD) system. From the characteristics of the structure and optical property, the grain size and surface roughness decrease while the optical transmission increase obviously under certain deposition parameters (gas pressure and substrate temperature) and longer etching time. Soft X-ray transmission measurements by synchrotron radiation are also carried out on the NCD films. The result shows that the X-ray transmission has an obvious improvement when the NCD film is fabricated from the hydrogen etching method. And the transmittance reaches 53.3% at X-ray photon energy of 258eV, which has met the requirement for X-ray mask materials. [Copyright &y& Elsevier]

Abstract: Due to different oriented diamond films having different properties, in this paper optical and electrical properties of different oriented diamond films have been investigated. The measured results indicate diamond films are of high quality and the properties of the (001)-oriented diamond film are better than those of the (111)-oriented one. Refractive index and extinction coefficient of (001)-oriented diamond film in the wavelength range of 2.5–12.5μm is 2.391 and in the order of 10−5, respectively. And for the (111)-oriented one it is 2.375 and in the order of 10−4. The dark current of the (001)-oriented diamond film is 33.7nA under an applied electric field of 100kV/cm. The resistivity of the (001)-oriented diamond film obtained is about 2.33×1010 Ωcm. The current of (001)-oriented diamond film is almost no change with the time testing. [Copyright &y& Elsevier]