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Deep oscillation magnetron sputtering (DOMS) is a novel high power impulse magnetron sputtering technique, which offers large voltage oscillation packets to generate a stable high-power discharge plasma with high ionization under virtually arc-free conditions. CrN/TiN superlattice coatings were deposited using a combined DOMS and pulsed dc magnetron sputtering (PDCMS) in a closed field unbalanced magnetron sputtering configuration. The Cr target was powered at 400 W by DOMS and Ti target was powered at 2000 W by PDCMS. The negative substrate bias ( V s ) ranged from 0 V to −100 V. As the V s was increased, CrN/TiN superlattice coatings showed a single phase face-centered cubic structure with a strong (1 1 1) texture. Correspondingly, the coatings exhibited the dense microstructure with well-defined interfaces between CrN and TiN layers. The increase in V s led to a decrease in grain size and an increase in the compressive residual stress. The hardness and Young's modulus of the coatings increased with increasing V s . The H / E * and H 3 / E * 2 ratios and critical loads L C in scratch test showed an initial increase, followed by a decrease. The wear mechanism changed from severe adhesion wear to abrasion wear. The coating deposited at V s = −60 V exhibited mild abrasion wear with the lowest friction coefficient of 0.27 and the lowest specific wear rate of 0.5 × 10 −6 mm 3 N −1 m −1 due to high hardness, H / E * and H 3 / E * 2 ratios, L C1 and L C3 of 36 GPa, 0.094, 0.316, 15.3 N and 24 N, respectively. The coatings also exhibited increasing pitting corrosion resistance with lower current density and higher corrosion potential in 3.5 wt% NaCl aqueous solution. Combined DOMS + PDCMS techniques can provide the engineering surfaces for the industrial applications with the combined improvement in wear and corrosion resistance. [ABSTRACT FROM AUTHOR]