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Abstract: Local charge neutralization using secondary electrons generated by an electron beam (EB) for SEM was devised and examined. Neutralization with a high-energy EB compared with conventional very low-energy EB requires no pulsing scheme for TOF-MS extraction voltage. Direct irradiation of high-energy EB to the insulating particle was not effective for neutralization. It was shown that the use of secondary electrons induced by EB-irradiation not on the particle directly but on a metal substrate vicinity of the particle. Charge neutralization was found to be effective even when the EB spot was distant (60μm). [Copyright &y& Elsevier]

Abstract: A novel TOF-SIMS apparatus was designed and constructed aiming at single small particle analysis. The apparatus consisted of high lateral resolution TOF-SIMS part and SEM function for seeking analytical target. A pulsed Ga-focused ion beam (FIB) was also newly developed for this purpose based on state-of-the art ion optics. Secondary ion yield of Al was 1.8×10−2 which is high enough small area analysis, and mass resolution was also acceptable for element analysis. The most prominent feature, lateral resolution, was demonstrated to be 40nm in actual mapping of an IC cross-section. As an application aerosol particles were analyzed individually. [Copyright &y& Elsevier]