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2 results on '"Thierry Camps"'

1. Optical Feedback Interferometry Based Microfluidic Sensing: Impact of Multi-Parameters on Doppler Spectral Properties

Author

Yu Zhao, Thierry Camps, Véronique Bardinal, and Julien Perchoux

Subjects
optical feedback interferometry, microfluidics, optical simulation, VCSELs, spectral imaging, sensing mechanisms, Technology, Engineering (General). Civil engineering (General), TA1-2040, Biology (General), QH301-705.5, Physics, QC1-999, Chemistry, QD1-999
Abstract

As a compact and simple sensing technique, optical feedback interferometry (OFI) can be a promising flowmetry method in various microfluidic applications. In this paper, OFI-based flowmetry sensor performance in a microscale flow scheme is studied theoretically and experimentally. An innovating model and different numerical methods are investigated, where the scattering light angle distribution is involved to predict the Doppler frequency distribution. For the first time, our model describes the influences of multiple OFI sensor system characteristics, such as flowing particle size, concentration, channel interface reflectivity and channel dimension, on the OFI signal spectral performances. In particular, a significant OFI signal level enhancement was achieved by deposing a high reflectivity gold layer on the rear channel interface due to the increased forward scattered light reflection. The consistent experimental validation associated with the simulations verifies this numerical simulation method’s reliability. The numerical methods presented here provide a new tool to design novel microfluidic reactors and sensors.

Published
2019
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2. Implementation of Integrated VCSEL-Based Optical Feedback Interferometry Microfluidic Sensor System with Polymer Microoptics

Author

Jean-Baptiste Doucet, Benjamin Reig, Yu Zhao, Qingyue Li, Julien Perchoux, Fabien Mesnilgrente, Véronique Bardinal, Clément Tronche, Pierre-François Calmon, Thierry Camps, Beijing University of Technology, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J), Service Instrumentation Conception Caractérisation (LAAS-I2C), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Equipe Capteurs optiques et systèmes intégrés intelligents (LAAS-OASIS), Équipe Optoélectronique pour les Systèmes Embarqués (LAAS-OSE), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Materials science, laser beam shaping, Microfluidics, microfluidic, 02 engineering and technology, 01 natural sciences, VCSEL, Collimated light, [SPI.MAT]Engineering Sciences [physics]/Materials, law.invention, Vertical-cavity surface-emitting laser, doppler, 010309 optics, law, 0103 physical sciences, General Materials Science, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Instrumentation, laser sensing, Fluid Flow and Transfer Processes, micro-nano, business.industry, Process Chemistry and Technology, General Engineering, 021001 nanoscience & nanotechnology, Laser, Chip, [SPI.TRON]Engineering Sciences [physics]/Electronics, Computer Science Applications, Lens (optics), Interferometry, Resist, technology, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, integrated microoptics, 0210 nano-technology, business
Abstract

Using the optical feedback interferometry (OFI) technique, we demonstrated a miniaturized and compact sensor system based on a dedicated optical source for flowmetry at the micro-scale. In the system, polymer microlenses were integrated directly on a VCSEL (vertical-cavity surface-emitting laser) chip and the microfluidic channel chip surface using polymer-based micro-fabrication technologies. In particular, at a post-process stage, we integrated a collimation lens on a VCSEL chip of small dimensions (200 &micro, m &times, 200 &micro, 150 &micro, m). This process was enabled by the soft-printing of dry thick resist films and through direct laser writing technology. We performed flow rate measurements using this new compact system, with a conventional bulk glass lens configuration for system performance evaluation. A maximum 33 dB signal-to-noise ratio was achieved from this novel ultra-compact system. To our knowledge, this is the highest signal level achieved by existing OFI based flowmetry sensors.

Published
2019
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