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Your search keyword '"Zepeda-Ruiz, Luis"' showing total 8 results
Start Over Author "Zepeda-Ruiz, Luis" Journal applied physics letters
8 results on '"Zepeda-Ruiz, Luis"'

8. Kinetics of strain relaxation in Si1-xGex thin films on Si(100) substrates: Modeling and comparison with experiments.

Author

Kolluri, Kedarnath, Zepeda-Ruiz, Luis A., Murthy, Cheruvu S., and Maroudas, Dimitrios

Subjects
*THIN films, *SOLID state electronics, *EPITAXY, *DYNAMICS, *QUANTUM theory, *RELAXATION (Nuclear physics), *PHYSICS
Abstract

We report the results of a theoretical analysis for the kinetics of strain relaxation in Si1-xGex thin films grown epitaxially on Si(100) substrates. The analysis is based on a properly parametrized dislocation mean-field theoretical model describing plastic deformation dynamics due to threading dislocation propagation and addresses strain relaxation kinetics during both epitaxial growth and thermal annealing, including post-implantation annealing. Theoretical predictions for strain relaxation as a function of film thickness in Si0.80Ge0.20/Si(100) samples annealed after epitaxial growth either unimplanted or after He ion implantation are in excellent agreement with experimental measurements [J. Cai et al., J. Appl. Phys. 95, 5347 (2004)]. [ABSTRACT FROM AUTHOR]

Published
2006
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