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Start Over Author "YUAN, Q." Journal applied physics letters
6 results on '"YUAN, Q."'

6. Control of the discharge chemistry of CHF3 in dual-frequency capacitively coupled plasmas.

Author

Yuan, Q. H., Ye, C., Xin, Y., Huang, X. J., Ning, Z. Y., and Yin, G. Q.

Subjects
*STRONGLY coupled plasmas, *PLASMA gases, *EMISSION spectroscopy, *MASS spectrometry, *DENSITY
Abstract

The discharge chemistry of CHF3 in 27/2, 60/2, and 60/13.56 MHz dual-frequency capacitively coupled plasmas (DF-CCPs) is studied with actinometric optical emission spectroscopy and mass spectrometry. The frequency effect on the generation of reactive species was investigated. The reactive radicals and the density ratio of F/CF2 could be controlled by the 2 MHz rf power in 27/2 and 60/2 MHz DF-CCPs. The density ratios of F/CF2 in 27/2 and 60/2 MHz DF-CCPs are observed to increase with an increase in low-frequency power. However, this control could not be obtained in 60/13.56 MHz DF-CCP. [ABSTRACT FROM AUTHOR]

Published
2008
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