Search

Your search keyword '"Steigerwald, M.L."' showing total 1 results
Start Over Author "Steigerwald, M.L." Journal applied physics letters
1 results on '"Steigerwald, M.L."'

1. Thermal stability of Ta[sub 2]O[sub 5] in metal-oxide-metal capacitor structures.

Author

Chang, J.P. and Steigerwald, M.L.

Subjects
*TANTALUM films, *TITANIUM nitride, *CAPACITORS, *X-ray spectroscopy, *OPTICAL properties
Abstract

Analyzes the composition and chemical states of the tantalum pentoxide or Ta[sub 2]O[sub 5] film in its interface with titanium nitride and tantalum nitride using x-ray photoelectron spectroscopy and Rutherford backscattering spectrometry. Metal-oxide-metal capacitor structures; More effective oxygen-diffusion barriers; Reduction of tantalum pentoxide.

Published
1999
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results