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Thick, high-quality epitaxial trilayers of YBa2Cu3O7−x/NdAlO3/YBa2Cu3O7 were grown on (100) MgO substrates by pulsed laser deposition. Compact resonators based on such trilayers were designed, fabricated, and tested. The resonant frequencies of the resonators were varied from 1.6 to 9.4 GHz by varying the device geometry within a die size of 2×2 mm. The values of the capacitive and inductive elements of the resonator and series resistance were estimated, and the frequency response of the circuit model was simulated. The measured and simulated resonant frequencies, insertion losses, and quality factors were in agreement. The contact resistivity of the Ag-YBa2Cu3O7−x contacts at the capacitor pads was found to dominate the loss in the resonator.

YBa2Cu3O7−x (YBCO) films were grown on SrTiO3 buffered (100)‐MgO substrates by pulsed laser deposition. The microstructure of the SrTiO3 layers was varied by changing the growth parameters and thickness. The surface morphology of the layers was characterized by atomic force microscopy. Stripline microwave resonators were fabricated from the films, and the resonator characteristics were measured. The microwave loss in the YBCO was found to correlate to SrTiO3 grain size.