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Start Over Author "Markus Wolkenhauer" Journal applied physics letters
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1. Investigation of micromechanical cantilever sensors with microfocus grazing incidence small-angle x-ray scattering

Author

Gina-Gabriela Bumbu, Ya-Jun Cheng, Markus Wolkenhauer, Jochen S. Gutmann, and Stephan V. Roth

Subjects
chemistry.chemical_classification, Materials science, Cantilever, Physics and Astronomy (miscellaneous), Small-angle X-ray scattering, Scattering, business.industry, Polymer, engineering.material, Quality (physics), Optics, Critical parameter, Coating, chemistry, engineering, ddc:530, Sensitivity (control systems), Composite material, business
Abstract

Micromechanical cantilever arrays coated with polymer brushes are an alternative to traditional chemical sensors. A critical parameter for the sensor sensitivity is the coating quality, and small changes in the coating uniformity generate a different behavior of the sensors. Microfocus grazing incidence small-angle x-ray scattering proved to be a sensitive tool to characterize coating quality, enabling a structural and chemical coating analysis.

Published
2006
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