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Your search keyword '"Inoue, M."' showing total 20 results
Start Over Author "Inoue, M." Journal applied physics letters
20 results on '"Inoue, M."'

4. Blocking of deuterium diffusion in poly-Si/Al2O3/HfxSi1-xO2/SiO2 high-k stacks as evidenced by atom probe tomography.

Author

Tu, Y., Han, B., Shimizu, Y., Kunimune, Y., Shimada, Y., Katayama, T., Ide, T., Inoue, M., Yano, F., Inoue, K., and Nagai, Y.

Subjects
ATOM-probe tomography, DEUTERIUM, METAL oxide semiconductor field-effect transistors, DIELECTRICS, HAFNIUM oxide
Abstract

Hydrogen (H) plays an important role in determining the reliability and performance of HfO2- and Al2O3-based high-k dielectric electronic devices. In order to understand H behavior, deuterium (D), an isotope of H, was introduced into the poly-Si cap of Al2O3/HfxSi1-xO2/SiO2 high-k stacks by ion implantation. Atom probe tomography was used to image the D distribution in samples annealed under different conditions. The results clearly demonstrated that the D atoms were trapped at the interface of poly-Si and Al2O3 after annealing at 900 K for 10 min. Thus, it is possible that Al2O3 blocks the H atoms at the surface, preventing them from diffusing into the high-k dielectrics during the H2 annealing process in current fabrication technology. The current work also exhibits an example of investigating H behavior in semiconductors by atom probe tomography. [ABSTRACT FROM AUTHOR]

Published
2018
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19. Using graded barriers to control the optical properties of ZnO/Zn0.7Mg0.3O quantum wells with an intrinsic internal electric field.

Author

Hall, C. R., Dao, L. V., Koike, K., Sasa, S., Tan, H. H., Inoue, M., Yano, M., Jagadish, C., and Davis, J. A.

Subjects
QUANTUM wells, ELECTRIC fields, WAVE functions, PHOTOLUMINESCENCE, ELECTROMAGNETIC fields
Abstract

Quantum wells with graded barriers are demonstrated as a means to control both the transition energy and electron-hole wave function overlap for quantum wells with an intrinsic internal electric field. In the case of c-axis grown ZnO/ZnMgO quantum wells, the graded barriers are produced by stepping the magnesium composition during the growth process. Four quantum wells with different structures are examined, where each well has similar transition energy, yet a wide range of wave function overlaps are observed. Photoluminescence and time resolved photoluminescence show good agreement with calculations. [ABSTRACT FROM AUTHOR]

Published
2010
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