1. Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization
- Author
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Gilles Bourbon, Joseph Lardies, Najib Kacem, Toky Rabenimanana, Patrice Le Moal, Vincent Walter, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
- Subjects
010302 applied physics ,Materials science ,Physics and Astronomy (miscellaneous) ,business.industry ,Linear regime ,Perturbation (astronomy) ,[PHYS.MECA]Physics [physics]/Mechanics [physics] ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Focused ion beam ,Nonlinear system ,0103 physical sciences ,Surface modification ,Optoelectronics ,Mass sensor ,0210 nano-technology ,business - Abstract
International audience; In order to overcome mode aliasing limitation in linear mode-localized sensors, we demonstrate in this letter both theoreticallyandexperimentallyhowtotunetheelectrostaticnonlinearityandexceedtheultimatesensitivityreachable in the linear regime. A mass sensor composed of two coupled micro-cantilevers with different lengths is considered and the results show that the sensitivity can be significantly enhanced up to 67 %. By performing experiments on the fabricated device and depositing the mass perturbation with a focused ion beam, the same phenomenon has been observed. These promising results open the way towards ultrasensitive multimodal microsensors with functionalized nonlinearities.
- Published
- 2020
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