1. Slow and fast traps in metal-oxide-semiconductor capacitors fabricated on recessed AlGaN/GaN heterostructures
- Author
-
Giuseppe Greco, Patrick Fiorenza, Fabrizio Roccaforte, Alfonso Patti, and Ferdinando Iucolano
- Subjects
Materials science ,Physics and Astronomy (miscellaneous) ,business.industry ,Annealing (metallurgy) ,Transistor ,Galliume Nitride (GaN) ,Wide-bandgap semiconductor ,Conductance ,Power Devices ,Heterojunction ,law.invention ,Threshold voltage ,Capacitor ,law ,MOSHEMT ,Optoelectronics ,business ,Forming gas ,Interface traps - Abstract
In this letter, slow and fast trap states in metal-oxide-semiconductor (MOS) capacitors fabricated on recessed AlGaN/GaN heterostructures were studied by frequency dependent conductance measurements. In particular, the comparison of devices before and after annealing in forming gas allowed to ascribe the fast states (with characteristic response time in the range of 5-50 mu s) to SiO2/GaN "interface traps," and the slow states (50-100 mu s) to "border traps" located few nanometers inside the SiO2 layer. These results can be important to predict and optimize the threshold voltage stability of hybrid MOS-based transistors on GaN.
- Published
- 2015
- Full Text
- View/download PDF