1. Growth of well-aligned carbon nanotube arrays on silicon substrates using porous alumina film as a nanotemplate
- Author
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Zhi Chen, Kozo Saito, Liming Yuan, Craig A. Grimes, Padmakar D. Kichambare, Dawei Gong, and Wenchong Hu
- Subjects
inorganic chemicals ,Materials science ,Physics and Astronomy (miscellaneous) ,Silicon ,Physics::Instrumentation and Detectors ,Anodizing ,Nanoporous ,Oxide ,chemistry.chemical_element ,Nanotechnology ,Carbon nanotube ,Condensed Matter::Mesoscopic Systems and Quantum Hall Effect ,complex mixtures ,law.invention ,Carbon nanotube quantum dot ,Condensed Matter::Materials Science ,chemistry.chemical_compound ,chemistry ,Potential applications of carbon nanotubes ,law ,Carbon nanotube supported catalyst - Abstract
Aligned, open-tipped carbon nanotube arrays of high density and uniformity were synthesized via a flame method on silicon substrates using a nanoporous template of anodized aluminum oxide from which the nanotubes were grown. The diameter and length of the nanotubes are controlled by the geometry of the aluminum oxide template. These results show the feasibility of integration between carbon nanotube arrays and silicon microelectronics.
- Published
- 2001
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