1. Broadband Bragg filter in microfabricated AlGaAs waveguides
- Author
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Seng-Tiong Ho, Maria K. Udo, T. Y. Chang, D. Y. Chu, P. F. Chapman, R. P. Espindola, S. L. Wu, H. Q. Hou, and Richard C. Tiberio
- Subjects
Materials science ,Fabrication ,Physics and Astronomy (miscellaneous) ,business.industry ,Bandwidth (signal processing) ,Physics::Optics ,Bragg's law ,Heterojunction ,Computer Science::Other ,Optics ,Broadband ,Physics::Accelerator Physics ,Optoelectronics ,Physics::Atomic Physics ,Optical filter ,business ,Lithography ,Diffraction grating - Abstract
We report on the fabrication and characterization of broadband Bragg filters in microfabricated AlGaAs waveguides. Electron‐beam lithography and chemically assisted ion‐beam etching were used to fabricate first‐order gratings with 250 nm period. Bragg filters with rejection bandwidth ∼15 nm and centered at ∼1.6 μm are demonstrated.
- Published
- 1996
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