1. High quality factor AlN nanocavities embedded in a photonic crystal waveguide
- Author
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Fabrice Semond, Jean-Yves Duboz, Delphine Néel, M. J. Rashid, Sylvain David, Xavier Checoury, Diane Sam-Giao, Philippe Boucaud, Meletios Mexis, Bruno Gayral, Christelle Brimont, Thierry Guillet, Sylvain Sergent, Nanophysique et Semiconducteurs (NPSC), PHotonique, ELectronique et Ingénierie QuantiqueS (PHELIQS), Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Institut d'électronique fondamentale (IEF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA), Université Nice Sophia Antipolis (1965 - 2019) (UNS), COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UCA), Laboratoire Charles Coulomb (L2C), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), European Project: 235114,EC:FP7:PEOPLE,FP7-PEOPLE-ITN-2008,CLERMONT4(2009), and Université Nice Sophia Antipolis (... - 2019) (UNS)
- Subjects
Photoluminescence ,Materials science ,Physics and Astronomy (miscellaneous) ,Silicon ,Physics::Instrumentation and Detectors ,business.industry ,Wide-bandgap semiconductor ,Physics::Optics ,chemistry.chemical_element ,02 engineering and technology ,Substrate (electronics) ,021001 nanoscience & nanotechnology ,01 natural sciences ,010309 optics ,Condensed Matter::Materials Science ,chemistry ,Etching (microfabrication) ,Quantum dot ,[PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other] ,0103 physical sciences ,Optoelectronics ,Reactive-ion etching ,0210 nano-technology ,business ,Photonic crystal - Abstract
International audience; We present a spectroscopic study of nanocavities obtained by small modifications of a W1 waveguide in an AlN photonic crystal membrane. The AlN film containing GaN quantum dots is grown on silicon. The photonic crystal structure is defined by e-beam lithography and etched by inductively coupled plasma reactive ion etching, while the membrane is released by selective etching of the silicon substrate. The room temperature photoluminescence of the embedded quantum dots reveals the existence of even-symmetry and odd-symmetry confined cavity modes and guided modes. Cavity mode quality factors up to 4400 at 395 nm and 2300 at 358 nm are obtained.
- Published
- 2012