1. Strain-relieved, dislocation-free InxGa1−xAs∕GaAs(001) heterostructure by nanoscale-patterned growth
- Author
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S.C. Lee, Huifang Xu, B. Pattada, L. R. Dawson, S. R. J. Brueck, and Ying-Bing Jiang
- Subjects
X-ray absorption spectroscopy ,Nanostructure ,Materials science ,Physics and Astronomy (miscellaneous) ,business.industry ,Nanotechnology ,Heterojunction ,Epitaxy ,Gallium arsenide ,chemistry.chemical_compound ,chemistry ,Optoelectronics ,business ,Nanoscopic scale ,Layer (electronics) ,Molecular beam epitaxy - Abstract
A strain-relieved, dislocation-free InxGa1−xAs layer is selectively grown on nanoscale SiO2-patterned GaAs(001) by molecular beam epitaxy. By localizing the epitaxial area to a periodic array of nanoscale circular holes opened in a SiO2 mask and allowing the InxGa1−xAs epilayers selectively grown on adjacent holes to coalesce over the SiO2 mask by lateral overgrowth, the strain of the resulting InxGa1−xAs layer (x=0.06) is relieved with a dramatically decreased generation of misfit dislocations. These experimental results qualitatively support the basic idea of the Luryi-Suhir proposal [Appl. Phys. Lett. 49, 140 (1986)].
- Published
- 2004
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