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Start Over "Fourmaux, S." Topic phase transitions Journal applied physics letters
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1. Grain size effect on the semiconductor-metal phase transition characteristics of magnetron-sputtered VO2 thin films.

Author

Brassard, D., Fourmaux, S., Jean-Jacques, M., Kieffer, J. C., and El Khakani, M. A.

Subjects
*SEMICONDUCTORS, *PHASE transitions, *MAGNETRONS, *ELECTRIC oscillators, *THIN films, *SPUTTERING (Physics)
Abstract

Single-phase vanadium dioxide (VO2) thin films have been grown on Si3N4/Si substrates by means of a well-controlled magnetron sputtering process. The deposited VO2 films were found to exhibit a semiconductor-to-metal transition (SMT) at ∼69 °C with a resistivity change as high as 3.2 decades. A direct and clear-cut correlation is established between the SMT characteristics (both amplitude and abruptness of the transition) of the VO2 films and their crystallite size. [ABSTRACT FROM AUTHOR]

Published
2005
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