1. High mobility InGaZnO4 thin-film transistors on paper.
- Author
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Lim, Wantae, Douglas, E. A., Kim, S.-H., Norton, D. P., Pearton, S. J., Ren, F., Shen, H., and Chang, W. H.
- Subjects
THIN film transistors ,SPUTTERING (Physics) ,ELECTRONIC apparatus & appliances -- Equipment & supplies ,LITHOGRAPHY ,DIELECTRICS - Abstract
We report on the fabrication and the electrical properties of amorphous (α-)InGaZnO
4 thin-film transistors deposited on cellulose paper by sputtering at room temperature. The 150-μm-thick paper was used as both a gate dielectric and a substrate for device structural support. The transistors on paper were patterned by lithography and operated in enhancement mode with a threshold voltage of 3.75 V, and exhibited saturation mobility, subthreshold gate-voltage swing, and drain current on-to-off ratio of ∼35 cm2 V-1 s-1 , 2.4 V decade-1 , and ∼104 , respectively. These results verify that simple cellulose paper is a good gate dielectric as well as a low-cost substrate for flexible electronic devices such as paper-based displays. [ABSTRACT FROM AUTHOR]- Published
- 2009
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