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Lamb wave resonators (LWRs) exhibiting high-quality factors and clean spectra demonstrate promising applications in RF communication and sensing. This paper discusses the relationship between the spurious mode, the quality factor, and the effective electromechanical coupling factor of resonators. When the resonant frequency of the spurious mode is slightly below the parallel resonant frequency (fp), the quality factor at fp (Qp) decreases dramatically. To enhance Qp and suppress the spurious mode, the LWRs with busbars including only the top electrode (non-overlap busbars) and the LWRs with busbars incorporating both top and bottom electrodes (overlap busbars) are designed and fabricated. The LWR with 12 μm-wide overlap busbars exhibits a notable enhancement in Qp, elevating it from 553.76 to 1488.17 and suppresses the spurious mode simultaneously. This research introduces a promising approach to suppress the spurious mode and enhance the quality factor of Lamb wave resonators, thereby holding great potential for applications in sensors and mobile communication. [ABSTRACT FROM AUTHOR]

The thin film bulk acoustic resonator (FBAR) has emerged as a promising choice for liquid sensors because of its high frequency and sensitivity. To investigate the potential of FBAR devices working as the liquid sensors, we study the operating law of FBAR in liquid environments and explore the different loading effects of liquid on the shear mode and longitudinal mode. By analyzing the device and liquid interactions, we modify the Mason model of FBAR in the liquid environment. Subsequently, the influence of the piezoelectric film with different tilt angles and liquids on the characteristics of FBAR is discussed. We also prepared Sc0.2Al0.8N film-based FBAR to confirm the influence of different liquid environments on the resonant performances. The results show that the frequency drift of FBAR in the shear mode is related to density and viscosity of liquid, and the frequency drift of FBAR in the longitudinal mode is related to bulk modulus and density of liquid. The resonant frequency of FBAR in the shear mode is more sensitive with glycerol solution than that of FBAR in the longitudinal mode. This work can provide a research basis for the application of FBAR liquid sensors. [ABSTRACT FROM AUTHOR]