1. Growth, characterization, and application of well-defined separated GaN-based pyramid array on micropatterned sapphire substrate
- Author
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Maofeng Guo, Minyan Zhang, Xilin Su, Shuai Wang, Lungang Feng, Zhenhuan Tian, Ye Zhang, Feng Yun, Qiang Li, S. W. Ricky Lee, Yufeng Li, and Wen Ding
- Subjects
010302 applied physics ,Materials science ,business.industry ,General Engineering ,General Physics and Astronomy ,02 engineering and technology ,Substrate (electronics) ,021001 nanoscience & nanotechnology ,Microstructure ,01 natural sciences ,law.invention ,Planar ,law ,0103 physical sciences ,Optoelectronics ,Quantum efficiency ,Dislocation ,0210 nano-technology ,business ,Laser drilling ,Light-emitting diode ,Pyramid (geometry) - Abstract
We tried to obtain microstructures on a three-dimensional (3D) micropatterned substrate by laser drilling. The influences of the dimensions of the drilling holes on the morphology and the material quality of the grown structures were studied. Uniform micropyramid arrays with relatively low dislocation density can be achieved by adjusting the laser drilling parameters. The internal quantum efficiency was estimated to be improved by a factor of 3 for a pyramid structure compared with that of planar LEDs. We fabricated 5 × 7 mm2 flexible LEDs employing the pyramid structure and the devices exhibited good flexibility without performance reduction after bending.
- Published
- 2017