1. Performance improvement after nitridation treatment in HfO2-based resistance random-access memory
- Author
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Pei-Yu Wu, Hao-Xuan Zheng, Xiaohua Ma, Tsung-Ming Tsai, Simon M. Sze, Hui-Chun Huang, Jen-Wei Huang, Yi-Ting Tseng, Ting-Chang Chang, Ming-Hui Wang, Chih-Cheng Shih, Yue Hao, and Wen-Chung Chen
- Subjects
010302 applied physics ,Random access memory ,Materials science ,business.industry ,General Engineering ,General Physics and Astronomy ,chemistry.chemical_element ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Resistive random-access memory ,chemistry ,Reaction model ,Resistive switching ,0103 physical sciences ,Optoelectronics ,Performance improvement ,0210 nano-technology ,business ,Tin ,Voltage - Abstract
Nitrogen atoms were introduced into a Pt/HfO2/TiN resistance random-access memory (RRAM) device to improve the resistive switching characteristics induced by a high-pressure nitridation treatment. Compared with a similar untreated HfO2 device, it exhibited superior performance, including a lower forming voltage, a higher on/off ratio, and high-endurance cycle operations. Current–voltage curve-fitting results confirmed the difference of the carrier transport mechanisms after the nitridation treatment. Finally, a reaction model was proposed to explain the improvement of RRAM switching due to the introduction of nitrogen atoms.
- Published
- 2018
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