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Random effects in the repeatability of refractive index and absorption edge position of tantalum pentoxide layers prepared by plasma-ion-assisted electron-beam evaporation, ion beam sputtering, and magnetron sputtering are investigated and quantified. Standard deviations in refractive index between 4*10 -4 and 4*10 -3 have been obtained. Here, lowest standard deviations in refractive index close to our detection threshold could be achieved by both ion beam sputtering and plasma-ion-assisted deposition. In relation to the corresponding mean values, the standard deviations in band-edge position and refractive index are of similar order.

H 2 S and particles from the atmosphere can damage silver reflectors. These defects lead to scattering and a reduction of reflectivity. With regard to these risks, the suitability of sputtered SiO 2 , Al 2 O 3 , and SiO 2 -Al 2 O 3 nanolaminates for the protection of Ag was analyzed. The optical properties, protection properties against H 2 S, solubility, film stress, and protection properties against particle-induced defect formation have been investigated. Especially in the case of particle-induced defects on protected Ag, differences between the protective coatings are considerable, and the nanolaminate layers have advantageous properties.

In the visible to infrared spectral range, highly-reflective silver mirrors are applied in the manufacture of optical instruments such as telescopes. However, it is still difficult to combine high reflectivity and long-term stability of the protected silver coating. We show that the deposition of impervious protective layers is necessary but often not sufficient for long-term environmental stability. Hygroscopic air borne particles absorbed by the protections surface attract water molecules and form a solution. This solution first damages the protection, subsequently permeates the protection and finally damages the silver whereby the reflectivity is reduced. We demonstrate this particular damage mechanism with different experiments and describe this mechanism in detail.

Material mixtures offer prospective possibilities for synthesizing coating materials with tailored optical constants. We present experimental results for mixture coatings of alumina/aluminum fluoride and alumina/hafnia deposited by electron beam evaporation. Thereby, the volume filling factors of the components are commonly estimated on the basis of deposition rates measured by quartz crystal microbalance. The interplay between the vapor fluxes from the two evaporation sources, the crosstalk between quartz crystal microbalances, and the influence of the plasma source on the tooling factors limit the accuracy of this estimation, and this has motivated us to develop an alternative approach. The general idea of our approach is based on the commonly high accuracy in thin-film optical constant determination using spectrophotometry. Therefore, these optical constants serve as a reliable input for a rather simple but robust evaluation procedure based on the concept of Wiener bounds. The consistency of the obtained results is illustrated by opposing the data to the elementary film composition estimated from energy-dispersive x-ray spectroscopy.

Aluminum layers protected with fluoride coatings have been deposited by evaporation and characterized with respect to their suitability as vacuum ultraviolet (VUV) mirrors. Optical characterization has been performed by spectrophotometry, while the surface quality of the layers has been judged by means of x ray reflection, scanning electron microscopy, and atomic force microscopy. In particular, protection with aluminum fluoride results in superior VUV reflection properties. VUV reflectance values between 80% and nearly 90% have been verified even two years after deposition and exposure to the atmosphere.

Copper island films have been prepared by thermal evaporation in vacuum and characterized by in situ as well as ex situ spectrophotometry. The parallel investigation of the island morphology by means of transmission electron microscopy allowed us to establish a clear correlation between film structure and optical properties. The effective optical constants of the copper island films could be determined by means of a fit of their ex situ transmission and reflection spectra. The effective optical constants have been used for designing and preparing optical multilayer coatings applicable for attenuator or color filter specifications. Measured characteristics of the multilayer coatings are in very good agreement with the calculated spectra.

Antireflective coatings on sapphire were optimized by variation of the coating design, the total thickness, and the highly refractive material used. The coatings were characterized with a focus on their scratch resistance. An increased resistance against scratching wear is shown for hafnia-containing coatings with a total thickness of about 500 nm.

Material mixtures offer new possibilities for synthesizing coating materials with tailored optical and mechanical properties. We present experimental results on mixtures of HfO2, ZrO2, and Al2O3, pursuing applications in UV coating technology, while the mixtures are prepared by magnetron sputtering, ion beam sputtering, plasma ion-assisted deposition (PIAD), and electron beam evaporation without assistance. The properties investigated include the refractive index, optical gap, thermal shift, and mechanical stress. The first high reflectors for UV applications have been deposited by PIAD.

The combination of in situ spectrophotometry during film deposition and ex situ spectrophotometry allows insight into the depth distribution of optical losses in plasma ion assisted deposition coatings. An adapted optical characterization strategy for absorbing coatings using only in situ transmittance data has been developed and is exemplified in application to magnesium fluoride coatings. Measurements and simulation results strongly indicate an increased absorption caused by local understoichiometry of the fluoride material close to the fused silica substrate.

We realized metal fluoride coatings with a high packing density and a low extinction coefficient by plasma (ion)-assisted deposition. The densification can be performed by different types of plasma sources, e.g., by a Leybold LION source and a Leybold APSpro, respectively. But the as-deposited coatings show a characteristic absorption behavior, whereas the absorption losses can be reduced in a postdeposition UV treatment step. We show experimental results of the plasma-assisted metal fluorides before and after the UV treatment and present a new model that allows us to describe and calculate the characteristic absorption losses of LaF3, MgF2, and AlF3.

Organic layers can be used to realize special functions in optical interference coatings. Suitable compounds for such layers were thermally evaporated and characterized. A plasma etching procedure was applied to produce nanostructures on top of the organic layers to reduce their effective refractive indices. Broadband antireflective coatings were obtained by combining these artificial low-index layers with conventionally prepared interference stacks.

Virtual deposition runs have been performed to estimate the production yield of selected oxide optical interference coatings when plasma ion-assisted deposition with an advanced plasma source is applied. Thereby, deposition of each layer can be terminated either by broadband optical monitoring or quartz crystal monitoring. Numerous deposition runs of single-layer coatings have been performed to investigate the reproducibility of coating properties and to quantify deposition errors for the simulation. Variations of the following parameters are considered in the simulation: refractive index, extinction coefficient, and film thickness. The refractive index and the extinction coefficient are simulated in terms of the oscillator model. The parameters are varied using an apodized normal distribution with known mean value and standard deviation. Simulation of variations in the film thickness is performed specific to the selected monitoring strategy. Several deposition runs of the selected oxide interference coatings have been performed to verify the simulation results by experimental data.

The extreme-ultraviolet (EUV)-induced oxidation of Mo/Si multilayer mirrors was characterized by several methods: EUV reflectivity, x-ray photoelectron spectroscopy, small-angle x-ray reflectometry, atomic force microscopy, and EUV scattering measurements. Based on the results of the different investigation techniques, an oxidation model was developed to explain the degradation of the mirrors under EUV radiation.

Polycarbonate is the chosen material for covers of automotive displays because it combines high transparency with high breaking strength. The requirements for coatings include an improvement of the scratch resistance and antireflection properties as well as high stability for challenging environmental conditions. A coating that involves all required properties has been developed and deposited onto polycarbonate by plasma-ion assisted deposition.

A new optical monitoring system has been developed that allows recording of transmission spectra in the wavelength range between 400 and 920 nm of a growing optical coating during deposition. Several kinds of thin film sample have been prepared by use of a hybrid monitoring strategy that is essentially based on a combination of quartz monitoring and in situ transmission spectra measurements. We demonstrate and discuss the applicability of our system for reengineering procedures of high-low stacks and measurements of small vacuum or thermal shifts of optical coatings.

Subwavelength structures of sufficient height-to-width aspect ratio are adequate for reduction of the Fresnel reflection of surfaces. In the case of low-pressure plasma-treated polymers, the self-organized features are stochastically distributed on the surface area with unequal shapes. Common descriptions use effective medium theory along with a continuously altering volume filling factor that together lead to a lateral homogeneous layer with a depth-dependent refractive index. We use a fixed gradient function for the refractive index for reverse engineering of in situ measured broadband optical data, and we compare the results with nonoptic methods.

Coatings of transparent conductive oxides, especially indium tin oxide (ITO), are important in different fields. So far, application of these materials has been limited to substrates with high thermal stability. We describe an improved coating process for ITO based on plasma ion-assisted evaporation at a substrate temperature below 100 degrees C, which is suitable for organic substrates. In characterizing the thin films, we used the classical Drude theory to calculate the resistivity from optical film properties and compared the data with linear four-point measurements. X-ray diffraction spectroscopy was used to determine the structural properties of the thin films.

A novel atomic layer deposition process for the preparation of fluoride thin films in a temperature range of 225 degrees C-400 degrees C is introduced. The crystallinity, morphology, composition, thicknesses, refractive indices, and transmittance of the films are analyzed. Low impurity levels are obtained at 350 degrees C-400 degrees C with good stoichiometry. Refractive indices of 1.34-1.42 for MgF(2), 1.43 for CaF(2), and 1.57-1.61 for LaF(3) films are obtained.

LaF(3) thin films of different thicknesses were deposited on CaF(2) (111) and silicon substrates at a relatively low substrate temperature of 150 degrees C. Optical (transmittance, reflectance, refractive index, and extinction coefficient) and mechanical (morphology and crystalline structure) properties have been investigated and are discussed. It is shown that LaF(3) thin films deposited on CaF(2) (111) substrates are monocrystalline and have a bulklike dense structure. Furthermore, it is presented that low-loss LaF(3) thin films can be deposited not only by boat evaporation but also by electron beam evaporation.

The Optical Society of America's Topical Meeting on Optical Interference Coatings convenes every three years to survey and capture advancements in the broad area of optical coatings. This meeting serves as a focal point for global technical interchange in the field of optical interference coatings. It includes papers on research, development, and applications of optical coatings, such as fundamental and theoretical contributions in the field as well as practical techniques and applications.

Gradient index coatings and optical filters are a challenge for fabrication. In a round-robin experiment, basically the same hybrid antireflection coating for the visible spectral region, combining homogeneous refractive index layers of pure materials and linear gradient refractive index layers of material mixtures, has been deposited. The experiment involved three different deposition techniques: electron-beam evaporation, ion-beam sputtering, and radio frequency magnetron sputtering. The material combinations used by these techniques were Nb(2)O(5)/SiO(2), TiO(2)/SiO(2), and Ta(2)O(5)/SiO(2), respectively. The spectral performances of samples coated on one side and on both sides have been compared to the corresponding theoretical spectra of the designed profile. Also, the reproducibility of results for each process is verified. Finally, it is shown that ion-beam sputtering gave the best results in terms of deviation from the theoretical performance and reproducibility.

Research and development are currently trying to run a storage ring free-electron laser down to 150 nm with robust optics. Vacuum-ultraviolet fluoride optics with protected oxide layers and enhanced metallic mirrors are investigated.

Mirrors for storage ring free-electron lasers in the vacuum ultraviolet must provide adequate reflectivity and resistance against synchrotron radiation. The free-electron laser system at ELETTRA (Trieste, Italy) is targeted to lase in the spectral range between 155 and 200 nm. It was demonstrated that dense oxide multilayer coatings allow lasing down to 189.9 nm. However, pure oxide systems show significant absorption at lower wavelengths and cannot be employed below 189.9 nm. Fluoride stacks can be deposited down to 130 nm with high reflection values above 95%, but their resistance against the harsh synchrotron environment is poor. They rapidly degrade; lasing cannot be realized with this mirror approach. For the range between 170 and 190 nm, hybrid systems--combining fluoride and oxide materials--have been manufactured. With appropriate deposition procedures, mirrors achieve reflectance values up to 99% and an adequate radiation resistance simultaneously. A mirror based on a conventional fluoride stack protected by a dense silicon dioxide protection layer was deposited and successfully employed for free-electron lasing at 176.4 nm.

A model of a rugate coating that takes into account production potentialities of the Leybold Syrus Pro 1100 deposition system is presented. An efficient algorithm for the synthesis of rugate coatings is proposed. Numerical results are also presented.

High-performance coatings for micromechanical mirrors were developed. The high-reflective metal systems can be integrated into the technology of MOEMS, such as spatial light modulators and microscanning mirrors from the near-infrared down to the vacuum-ultraviolet spectral regions. The reported metal designs permit high optical performances to be merged with suitable mechanical properties and fitting complementary metal-oxide semiconductor compatibility.

Vacuum-ultraviolet (VUV) narrow-bandpass filters with central wavelengths at 177.5, 180.7, and 193 nm are necessary for analytical chemistry applications and for atomic emission spectrum separation. The emission spectra are so close that the required passbands of these filters are 1 to 2 nm with a maximum of 2 nm. We first investigated the designs based on the Fabry-Perot model with fluoride materials and second the deposition of narrow-bandpass filter components by using evaporation deposition. VUV spectral characterizations show that the filter components meet the requirements for analytical chemistry applications.

We discuss the approaches to preserve the high-reflectance aluminum mirror for the vacuum-ultraviolet spectral region. Single fluoride and oxide layers, a homogeneous multilayer, and hybrid multilayer solutions are put forward. Single fluoride and oxide materials have achieved reflectance above 90% at 193 nm. Multilayer capping can provide reflectance of 93.4% at 193 nm, and a hybrid multilayer of fluoride and oxide can achieve reflectance above 90% to 160 nm.

Plastic optical parts require antireflective as well as hard coatings. A novel design concept for coating plastics combines both functions. Symmetrical three-layer periods with a phase thickness of 3/2pi are arranged in a multilayer to achieve a step-down refractive-index profile. It is shown mathematically that the equivalent index of symmetrical periods can be lower than the lowest refractive index of a material used in the design, if the phase thickness of the symmetrical period is set equal to 3/2pi instead of the usual pi/2. The straightforward application of the concept to the design of antireflection coatings in general is demonstrated by example.

High-reflectivity dense multilayer coatings were produced for the ultraviolet spectral region. Thin-film single layers and UV mirrors were deposited by ion plating and plasma ion-assisted deposition high-energetic technologies. Optical characterizations of HfO2 and SiO2 single layers are made. The optical constants obtained for these two materials are presented. HfO2 and SiO2 mirrors with a reflectance of approximately 99% near 250 nm are reported.

Mechanical stress and the structures of SiO2, Al2O3, and HfO2 single oxide layers and of high-reflection multilayer coatings deposited by reactive evaporation, plasma ion-assisted deposition, and ion-beam sputtering have been studied. The stress was related to the microstructure and to the incorporation of water by means of infrared spectroscopy. From the slopes of measured stress-temperature curves of these coatings deposited onto two substrate materials (silicon and fused silica), the biaxial moduli and the thermal expansion coefficients of the films were estimated.

The properties of a thin film of a given material depend on the film's real structure. The real structure is defined as the link between a thin film's deposition parameters and its properties. To facilitate engineering the properties of a thin film by manipulating its real structure, thin-film formation is reviewed as a process starting with nucleation followed by coalescence and subsequent thickness growth, all stages of which can be influenced by deposition parameters. The focus in this review is on dielectric and metallic films and their optical properties. In contrast to optoelectronics all these film growth possibilities for the engineering of novel optical films with extraordinary properties are just beginning to be used.

The coating of plastics for optical applications is intended to improve the mechanical durability of soft polymers and to serve an antireflection function. Usually a classic four-layer antireflection system is added on top of a single-layer hard coating. With needle optimization, an alternative coating design has been developed. The design is characterized by thin high-refractive-index layers that are almost evenly distributed over the whole stack. Plasma ion-assisted deposition was used to deposit coatings upon poly(methyl methacrylate), polycarbonate, and cyclo-olefin copolymer. Uniform antireflection and high scratch resistance have been achieved.

Working with wavelengths shorter than the deep ultraviolet involves the development of dedicated optics for free-electron lasers with devoted coating techniques and characterizations. High-performance deep-ultraviolet optics are specially developed to create low-loss, high-reflectivity dielectric mirrors with long lifetimes in harsh synchrotron radiation environments. In February 2001, lasing at 189.7 nm, the shortest wavelength obtained so far with free-electron-laser oscillators, was obtained at the European Free-electron-laser project at ELETTRA Synchrotron Light Laboratory, Trieste, Italy. In July 2001, 330-mW extracted power at 250 nm was measured with optimized transmission mirrors. Research and development of coatings correlated to lasing performance are reported.

Chromium-scandium (Cr-Sc) is a promising material combination for multilayer mirrors in the water window region. A possible x-ray source for laboratory use in this wavelength range is the nitrogen K(alpha) line at 3.16 nm. High reflectivities at this wavelength can be achieved with Cr-Sc multilayer mirrors if the interfaces between adjacent layers are smooth. The growth parameters of the magnetron sputtering process for these materials have been optimized. It is shown that the reflectivity of such mirrors can be considerably improved by the application of a proper bias voltage during film growth. The high quality of the multilayer films is demonstrated with copper K(alpha) x-ray reflection and transmission electron microscopy. The reflective properties of the multilayers close to the nitrogen K(alpha) line were measured with synchrotron radiation for different angles of incidence. Reflectivities between R = 5.9% for near-normal incidence (theta = 1.5 degrees) and R = 29.6% for theta = 59.9 degrees were measured.

Thin films of SiO(2), TiO(2), Ta(2)O(5), ZrO(2), and the mixed oxide H4 (Merck) have been deposited onto nonheated glass substrates by electron-beam evaporation in commercial coating plants. All depositions have been carried out with ion assistance provided by three different ion or plasma sources (end-hall, plasma, and cold-cathode sources). The optical film properties such as index of refraction, extinction coefficient, light scattering, and absorption have been examined by spectrophotometry, laser calorimetry, and total integrated light-scatter measurements. Surface morphology has been investigated by atomic force microscopy studies. Furthermore, films have undergone sand erosion tests for the determination of relative wear resistance. The film properties are compared for the three different ion sources.

Near-infrared spectroscopy has been applied to determine the water content of plastic lenses. An analytical method is presented for monitoring the water permeability of thin layers on plastic optics by utilizing the reversible moisture absorption of organic polymers. As an example, scratch-resistant and antireflective layers on poly[diethylenglycol-bis(allylcarbonate)] lenses are investigated. The measurements demonstrate the relatively high water barrier of coatings deposited by plasma-ion-assisted deposition compared with classical physical vapor deposition coatings and polysiloxane dip coatings.

A new measurement technique for the characterization of uniaxial as well as biaxial anisotropic surfaces and thin films is introduced. This technique is based on perpendicular-incidence photometric ellipsometry, in which a spectral-photometric dynamic ellipsometer with a rotating polarizer is used. This method is sensitive, contactless, nondestructive, and efficient for the estimation of anisotropic behavior. Furthermore, the spectroscopic measurement directly provides the anisotropy dispersion down to the UV wavelength range. Results on structurally anisotropic HfO(2) coatings are presented.

Highly reflective LaF(3)/MgF(2) systems for a wavelength of 248 nm on MgF(2) and crystalline quartz substrates were investigated. The influence of laser conditioning on damage threshold and absorptance was remarkable in those coatings that had a high initial absorptance. Monitoring with a laser calorimeter revealed the conditioning effect to be a function of the irradiation dose rather than of energy density or pulse rate. Furthermore, x-ray photoelectron spectroscopy and transmission electron microscopy investigations showed that conditioning induces stoichiometric and structural changes in the multilayers, especially in near-surface sublayers, whereas scanning electron microscopy and atomic force microscopy investigations indicated that the surface remains unchanged.