1. Ion beam sputtering coatings on large substrates: toward an improvement of the mechanical and optical performances
- Author
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Renée Pignard, B. Lagrange, Danièle Forest, P. Ganau, N. Morgado, Alban Remillieux, Laurent Pinard, J.-L. Montorio, Bernard Cimma, Jean-Marie Mackowski, Christophe Michel, Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), and VIRGO
- Subjects
Materials science ,Materials Science (miscellaneous) ,Virgo interferometer ,engineering.material ,Optics at surfaces : Thin films ,01 natural sciences ,Industrial and Manufacturing Engineering ,010309 optics ,chemistry.chemical_compound ,Optics ,Coating ,0103 physical sciences ,Tantalum pentoxide ,[PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] ,Materials : Optical materials ,Business and International Management ,Thin film ,Absorption (electromagnetic radiation) ,Wavefront ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,010308 nuclear & particles physics ,business.industry ,Scattering ,Instrumentation measurement and metrology : Interferometry ,Interferometry ,chemistry ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,engineering ,business - Abstract
Large mirrors (∅350 mm) having extremely low optical loss (absorption, scattering, wavefront) were coated for the VIRGO interferometer. The new generation of mirrors needs to have a better wavefront and lower mechanical loss. To improve the component wavefront, the corrective coating technique was used. By doping the tantalum pentoxide layers, we improved, for the first time to our knowledge, the multilayer mechanical loss. The first results are discussed.
- Published
- 2006
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