Search

A design of a two-reflection mirror for nested grazing-incidence optics is proposed in which maximum overall reflectivity is achieved by making the two grazing-incidence angles equal for each ray. The design is proposed mainly for application to nonimaging collector optics for extreme-ultraviolet microlithography where the radiation emitted from a hot plasma source needs to be collected and focused on the illuminator optics. For completeness, the design of a double- reflection mirror with equal reflection angles is also briefly outlined for the case of an object at infinity for possible use in x-ray applications.

A formula is derived for the total width of the angle spread function in an imaging optical system, the performance of which is degraded by surface roughness. The derivation is done in the framework of the scalar theory of diffraction, but it does not rely on the small roughness approximation. The contribution of scattering from surface roughness to the total width of the angle spread function is found to depend only on the variance of the roughness slope. It is also shown that the common rule of obtaining the total width of the angle spread function as a square sum of the pure scattering component and the pure specular component is actually incorrect and does not fully account for the contribution of the specular component.