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Compared with normal reflecting scanning transform Spectrometry, cube-based Spectrometr is a key component in the time-based modulation interference spectrometer, it have more compact structure ,using less accessory , easy to fix up , more steadily and more practicality . Calculations on optical path difference (OPD) of spectrometry play an important role in analyzing and improving of the structure. Following the law of Malus and the geometrical relationship of model, get the formula of OPD and the affective factors .The calculation results demonstrate that OPD is closely related to the tilted angel of rotating reflector , the size of cube reflector and the refractive index of reflector. And this kind of spectrometry has the character of high resolution, especial in some spectrum.

In order to explore micro-beam relaxation dynamics of MEMS, the beam deflection relaxation expression considering air slide-film damping effect was educed based on Euler–Bernoulli equation with boundary conditions of two hinged ends. The beam deflection relaxation process under over damping, critical damping and under damping was calculated used Maple. The relaxation simulation data of micro-beam with two hinged ends used ANSYS demonstrate that relaxation process conform to theoretical calculation and relaxation period of under damping relaxation approximate constant when damping coefficient is small, but increase significantly when damping coefficient is large.